基于微悬臂梁的近场动态无损检测仿真

Near-Field Dynamic Non-Destructive Detection Simulation Based on Microcantilever

摘要: 提供了一种用于近场无损检测研究的采用微悬臂梁进行接收超声波的动态检测技术,借助COMSOL Multiphysics有限元软件模拟了微悬臂梁传感器接收由超声换能器所产生的超声波的动态响应。在进行逐点扫描时，探针针尖恰好在微缺陷上方时，振幅达到其最大值。并与试验结果进行对比，验证了该模拟方法的可行性，有助于对微器件缺陷精确的定性、定量表征作更深一步的理论研究，为后续的实验设计提供了参考，对更加微小的缺陷的检测，可通过改变微悬臂梁厚度或采用更高阶次的悬臂梁以增加谐振频率来实现。

Abstract: An ultrasonic near-field dynamic non-destructive detection method based on Microcantilever is proposed to receive ultrasonic wave, and dynamic response of the near-field scattering of waves from Ultrasonic transducer using microcantilever receiver can be known with FET software COMSOL Multiphysics. The receiver scans the surface point by point and approaches the defect, when the receiver is just ahead of the defect, and the amplitude shows its maximum peak-to-peak value. The changes in the amplitude come from the near-field surface wave interaction with the free boundary of the defect wall. By contrast with experimental results, feasibility of the simulation method is demonstrated, which will contribute to deeper theoretical research on defect location of the micro-components, affording the reference for the follow- up experimental design. Higher resolution is obtained by changing the thickness of the cantilever or adopting more higher order frequency in order to test nano-defects.