二氯二氢硅反歧化系统试验研究
A Study of Anti-Disproportionation System of Dichlorosilane
DOI: 10.12677/HJCET.2015.51001,
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作者:
王洪光, 张艳春, 李 锋, 邵 枫, 冯 雷, 白竟超:国电内蒙古晶阳能源有限公司,内蒙古 鄂尔多斯
关键词:
反歧化;转化率;经济效益;Anti-Disproportionation; Conversion Rate; Economic Efficiency
摘要:
本文介绍反歧化系统,利用合成氯硅烷及还原尾气中的二氯硅烷,与回收四氯硅烷反应制备三氯氢硅,二氯硅烷转化率 > 95%,既有效解决生产过程中,安全环保的问题,又降低生产成本,增加企业经济效益。
Abstract:
This paper describes an anti-disproportionation system which prepares trichlorosilane by using synthetic chlorosilane, reducing exhaust dichlorosilane, and the recycled silicon tetrachloride. The conversion rate of dichlorosilane reaction was more than 95%, which could not only effectively solute the safety and environmental issues in production process, but also reduce production costs and increase economic efficiency of enterprises.