摘要:
有效检测易燃、易爆、有毒、有害气体及时掌握污染发生和发展实况，并对污染进行有效控制，需要高灵敏度检测方法。气体传感器是气体检测系统的核心，作为传感技术的一个重要分支光波导传感器以独特的优势同样受到了广泛重视。本论文介绍了光波导传感器在检测有毒气体中的原理和制作方法，并且对利用光波导传感器方法来检测有害气体的最新研究成果进行综述。
In order to determine flammable, explosive, toxic and harmful gases, and to grasp the occurrence of pollution and its development and control effectively, there is a need for highly sensitive detecting method. The gas sensor is a core of the gas detecting system. The optical waveguide (OWG) sensor is an important branch of the sensor technology, and attracts considerable attention with its unique qualities. This paper introduces the principle and making method of optical waveguide sensor in the detection of toxic gases, and latest research results of the optical waveguide sensor that detecting harmful gases are reviewed.