光学增透和增反多层膜的设计与计算

The Design and Calculation of Optical Anti-Reflected and Reflected Multilayer Film

摘要: 本文概括了四种常用的光学增透和增反多层膜结构的设计理念，如高低折射率交替设计、对称等效法、周期性薄膜设计、渐变式薄膜设计等。总结了计算多层膜光学特性的三种方法，包括递推法、菲涅尔系数矩阵法和特征矩阵法。利用MATLAB程序计算了三种方法典型的增透膜与增反膜的反射率，并且利用递推法，分别以薄膜厚度与折射率为自变量，计算了多层增透膜的反射率。

Abstract: This paper gives a brief introduction about the four methods for the structural design of the optical multilayer films, such as the alternated high and low refractive index method, the symmetrical imitated method, the periodic method and the gradient method. Three methods for calculation of the multilayered optical properties are reviewed, including the recursive method, the Fresnel co-efficient matrix method and the characteristic matrix method. These three methods are applied to calculate the reflectivity of the anti-reflected and the reflected multilayer film. By using the recur-sive method, the reflectivity of the anti-reflected multilayer film is obtained as a function of the film thickness and refractive index.