极板间距对DLC薄膜拉曼光谱的影响
The Effect of Plate Spacing on the DLC Films’ Raman Spectroscopy
DOI: 10.12677/MS.2017.73052, PDF, HTML, XML, 下载: 1,723  浏览: 3,046  科研立项经费支持
作者: 任 瑛：河南工业大学材料科学与工程学院，河南 郑州；王明超：大连理工大学材料科学与工程学院，辽宁 大连
关键词: 射频等离子体；类金刚石薄膜；拉曼光谱；极板间距；Radio Frequency Plasma； Diamond-Like Carbon Films； Raman Spectroscopy； Plate Spacing
摘要: 采用射频等离子增强化学气相沉积法(RF-PECVD)，使用CH4和H2作为气源，通过改变极板间距，在Si(100)衬底上制备类金刚石(DLC)膜。采用拉曼光谱表征DLC薄膜的微观结构，结果表明，制备的薄膜中含有sp3、sp2杂化碳键，具有典型的类金刚石结构特征，且以六方或菱方结构存在。通过分峰及计算表明：G峰位置和ID/IG值不断上升的趋势说明薄膜和衬底之间的应力逐渐改变，薄膜中六角碳环结构的含量随着极板间距的上升而不断增加；随着极板间距在8~17 cm范围内的增大，sp3键的含量在0%~20%范围内先减少后增加。
Abstract: Using radio frequency plasma enhanced chemical vapor deposition (RF-PECVD), CH4 and H2 as gas sources, diamond-like carbon (DLC) films were prepared on the substrate of Si(100) by varying the plate spacing using radio frequency plasma enhanced chemical vapor deposition (RF-PECVD). Raman spectroscopy was used to characterize the microstructure of these films. The results show that the deposited films are typical DLC films with sp3 and sp2 bonds and the crystal structure of diamond in films were Hexagonal or rhombohedral. G peak position and ID/IG ratio were found to be increased, which indicated that the strain between film and substrate was changed and the ring structure content was increased with the increase of plate spacing. The content of sp3 bond was decreasing in the range of 0% - 20% with increasing the plate spacing between 8 - 17 cm.
文章引用：任瑛, 王明超. 极板间距对DLC薄膜拉曼光谱的影响[J]. 材料科学, 2017, 7(3): 387-394. https://doi.org/10.12677/MS.2017.73052

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