薄膜缺陷的分类和光学表征研究

An Optical Characterization of Film Defect Based on the Classification

摘要: 缺陷对于薄膜的光学、电学、热学等性质有很重要的影响，缺陷研究在薄膜制备、薄膜检测以及薄膜表征等领域中有极其重要的意义。本文从不同角度对晶体薄膜缺陷进行了分类，提出了一种利用光电探测技术并结合计算机来对薄膜缺陷显微过程进行控制的薄膜缺陷探测方法，以及一种新的光学常数测定方法对晶体薄膜缺陷进行表征。无论是从结构、力学、能量、运动、热力学和光学等方面进行分类，还是表征，这些考虑问题的角度，不是孤立的，而是相互联系的。通过上述工作，能够对薄膜缺陷有一个完整和系统的认识。

Abstract: Defects of the thin-film have very important implications for its optical, electrical, thermal and other physical properties, so that the defects investigation has great significance to the preparation of thin films, the film detection and characterization. By different angles, the crystal defects of thin film are classified. A defect detection method is presented, which uses a photoelectric detection technology combined with the computer to process the film microstructure and control film defects. According to this detection method, a new determination of optical constants can be used to characterize the crystal thin-film defects. Either the classification of film defects from structure, mechanics, energy, motion, thermodynamics and optics, or cha-racterization of film defects, these considerations point of view the problems are not isolated, but interrelated. This work can be helpful to have a complete and systematic understanding of membrane defects.