EB-PVD设备灯丝加热电源的研制

The Design of Filament Heating Power Sup-ply for EB-PVD Machine

摘要: 稳定可靠的灯丝加热电源是保障EB-PVD设备长期稳定工作的关键部件之一，采用三级AC-DC拓扑、低漏感的灯丝变压器、双闭环控制策略设计制造了灯丝加热电源。并将所研制灯丝加热电源与EB-PVD设备其它部件等进行系统集成，组成EB-PVD试验装置，对所研制灯丝加热变压器输入电压波形和最大输出电流进行检测，灯丝加热电流达到150A以上；并且在此装置上测试了灯丝加热电流与输出电子束流的对应关系。试验结果表明：所研制的灯丝加热电源能够满足EB-PVD设备工作需求。

Abstract: In order to enhance the performance and flexibility of EB-PVD machine, the topology circuit of three parts of AC-DC circuits, low leakage inductance transformer, double closed loop control have been adopted to design the filament heating power supply. The filament heating power supply, EB-PVD gun, vacuum system and other control system were assembled to establish a set of EB-PVD test equipment. The maximal output current of filament heating power supply and the voltage waves at the primary winding of filament heating transformer had been tested, and the EB current output corresponding the current of filament also had been measured. These test results show that the filament heating power supply has fine applicability for EB-PVD machine.