作者:
S Tanimoto,N Kiritani,M Hoshi,H Okushi
关键词:
4H-SiC ; Contact ; Contact Annealing ; Contact Resistance ; α-SiC
摘要:
Silicon Carbide and Related Materials 2001: Ohmic Contact Structure and Fabrication Process Applicable to Practical SiC Devices... Ohmic Contact Structure and Fa...
在线下载