宽带多齿谐振光栅反射镜的研究
A High Efficient Reflector Utilized by a Subwavelength Multi-Subpart Profile Grating Structure
DOI: 10.12677/APP.2016.68022, PDF,    国家自然科学基金支持
作者: 吴华明*, 徐欢欢, 马林飞, 肖文波, 段军红：无损检测与光电传感技术及应用国家地方联合工程实验室、无损检测技术教育部重点实验室， 江西 南昌；江西省光电检测技术工程实验室、南昌航空大学测试与光电工程学院，江西 南昌；肖永生, 黄丽贞：南昌航空大学信息工程学院，江西 南昌
关键词: 衍射光栅；泄露模谐振；反射镜；Diffraction Gratings； Leaky Mode Resonance (LMR)； Reflectors
摘要: 本文中，基于单层多齿光栅结构，我们设计、优化了一种高性能的谐振光栅反射镜。严格耦合波分析算法表明，对于TE偏振光，此结构在1.47~2.1 μm宽谱范围内，其0级反射率大于98.5% (R0 > 98.5%)，在中心波长1.8 μm处，角度带宽约为28˚。另外，我们还分析了此器件的工艺容差性能。
Abstract: In this study, a high efficient reflector constructed by only a single layer subwavelength grating with multi-subpart profiles is addressed. The properties of the grating reflector are investigated by rigorous coupled-wave analysis. It is shown that for transverse electric (TE) polarized wave, over a broadband spectrum of 1.47 - 2.1 μm, the reflector demonstrates high reflectivity (R0 > 98.5%) and wide angular bandwidth (about 28˚) at 1.8 μm. Effects of deviation from the design parameters on the reflection spectra are also presented.
文章引用：吴华明, 徐欢欢, 马林飞, 肖永生, 黄丽贞, 肖文波, 段军红. 宽带多齿谐振光栅反射镜的研究[J]. 应用物理, 2016, 6(8): 167-174. http://dx.doi.org/10.12677/APP.2016.68022

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