二氯二氢硅反歧化系统试验研究

A Study of Anti-Disproportionation System of Dichlorosilane

摘要: 本文介绍反歧化系统，利用合成氯硅烷及还原尾气中的二氯硅烷，与回收四氯硅烷反应制备三氯氢硅，二氯硅烷转化率 > 95%，既有效解决生产过程中，安全环保的问题，又降低生产成本，增加企业经济效益。

Abstract: This paper describes an anti-disproportionation system which prepares trichlorosilane by using synthetic chlorosilane, reducing exhaust dichlorosilane, and the recycled silicon tetrachloride. The conversion rate of dichlorosilane reaction was more than 95%, which could not only effectively solute the safety and environmental issues in production process, but also reduce production costs and increase economic efficiency of enterprises.