摘要:
本文对应力测量方法进行了评述和展望。主要介绍了多种传统测量应力的方法及原理，如小孔法、X射线衍射法、磁测法、超声波法、裂纹柔度等方法。并且提出了潜在可以用来表征薄膜界面间应力的一种新方法——溅射深度剖析定量分析。
Abstract: The methods for stress measurement are reviewed and discussed, focusing on the principles and application of several traditional methods, such as Hole method, X-ray diffraction method, Magnetic method, Ultrasonic method, crack compliance method and so on. A new promising method, quantitative sputter depth profiling, is proposed for characterizing the stress gradient at interface.