镀膜元件低频面形参数的有限元模拟及分析方法

A Finite Element Analysis Method of Low Frequency Surface Figure Parameters of Coating Components

摘要: 利用有限元法对基片镀膜引起的变形量进行了模拟，通过数据转换将模拟结果输入Metropro 8.3.5面形处理软件，得到了低频面形参数变化量。对比模拟结果与实测结果，发现两者非常接近。利用该方法实现了形状复杂、口径较大镀膜基片面形参数变化量指标的预估，使得镀膜元件面形主动量化控制成为可能。

Abstract: The deformation caused by substrate coating is simulated by using the finite element method; then simulation results input Metropro 8.3.5 surface graph processing software through the data conversion; at last we obtain the low frequency surface parameter variation. The simulated results and measured results are compared. The comparison shows that the simulated results and measured results are very close. The surface shape parameters variation index of the complex shape, and large diameter coating substrate can be forecast through this method, and it is possible to control the surface shape active quantitative of coating components.