碳化硼废液微粉回收制备及再利用于蓝宝石衬底加工之研究

Study on Recovery and Preparation of Boron Carbide Waste Slurry Fine Powder and Reuse in Sapphire Substrate Processing

摘要: 碳化硼微粉作为蓝宝石衬底研磨工艺中的介质，因其硬度高并可与蓝宝石衬底表面进行磨削，进而修复来自线切痕的损伤以及衬底全区域性的平坦化，故使用量亦蓝宝石衬底需求随之升高。本文简述了对研磨废液中碳化硼微粉的制备及再应用于加工，试验表明研磨后的废液通过物理化学等处理步骤后，可筛分出D50粒径在44~51 µm范围的微粉，并经不同新粉与回收粉比例混合应用于蓝宝石衬底精磨加工。新粉与回收粉搭配3:1作业下Ra分别在1.02 µm与0.99 µm较为相近，以及表面良率分析上回收粉配比在1:3以上与对照组99.66%的差异仅在0.01%~0.04%范围，其结果对于量产上是可被接受，可提供产业一种再利用的方式。

Abstract: As a medium in the lapping process of sapphire substrates, boron carbide fine powder is used be-cause of its high hardness and the ability to grind the surface, thereby repairing the damage from the slicing and the flattening of the entire region of the substrate. This article briefly describes the preparation and reuse of boron carbide fine powder in lapping waste slurry. The result shows that after the lapping waste slurry passes through physical and chemical treatment steps, fine powder with a D50 particle size ranging from 44 to 51 µm can be screened out. And mixed with 3:1 new and recycled powder is close to 1.02 µm and 0.99 µm respectively, and the ratio of recycled powder above 1:3 on the surface yield is only 0.01% - 0.04% different from the control group of 99.66%. It was acceptable for mass production and provided a way for industry to reuse.