MS  >> Vol. 1 No. 1 (April 2011)

    An Optical Characterization of Film Defect Based on the Classification

  • 全文下载: PDF(340KB) HTML    PP.23-29   DOI: 10.12677/ms.2011.11005  
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Thin film
Film defects Defect classification Defect characterization



Defects of the thin-film have very important implications for its optical, electrical, thermal and other physical properties, so that the defects investigation has great significance to the preparation of thin films, the film detection and characterization. By different angles, the crystal defects of thin film are classified. A defect detection method is presented, which uses a photoelectric detection technology combined with the computer to process the film microstructure and control film defects. According to this detection method, a new determination of optical constants can be used to characterize the crystal thin-film defects. Either the classification of film defects from structure, mechanics, energy, motion, thermodynamics and optics, or cha-racterization of film defects, these considerations point of view the problems are not isolated, but interrelated. This work can be helpful to have a complete and systematic understanding of membrane defects.

张媛媛, 姚文静, 王楠, 王建元. 薄膜缺陷的分类和光学表征研究[J]. 材料科学, 2011, 1(1): 23-29.


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