基本情况

李俊红,工学博士,研究员,博士生导师。主持国家自然科学基金面上项目、预研、所创新等项目多项,并以主要成员参加了国家自然科学基金重点项目、中科院重点、重大项目等研究课题。发表论文50余篇,申请发明专利20余篇。


研究领域

微电子机械系统,压电、铁电薄膜及其器件研究


教育背景

2004年至2009 博士,中国科学院声学研究所

1999年至2002 硕士,北京理工大学

1995年至1999 学士,北京理工大学


论文发表


  1. Qingqing Fan,Dongning Li,Junhong Li(通讯作者),Chenghao Wang, Structure and piezoelectricity properties of V-doped ZnO thin films fabricated by sol-gel method,Journal of Alloys and Compounds,2020,829(15),154483
  2. Junhong Li, Chenghao Wang, Wei Ren and Jun Ma, ZnO thin film piezoelectric micromachined microphone with symmetric composite vibrating diaphragm, Smart Materials and Structures, 2017,26(5),055033
  3. Junhong Li,Wei Ren,Guoxiang Fan,Chenghao Wang, Design and Fabrication of Piezoelectric Micromachined Ultrasound Transducer (pMUT) with Partially-Etched ZnO Film, Sensors, 2017,17(6),1381
  4. Guoxiang Fan, Junhong Li (通讯作者),Chenghao Wang,Design and Analysis of MEMS Linear Phased Array, Micromachines, 2016, 7(1),8
  5. 李俊红,魏建辉,马军,任伟,刘梦伟,汪承灏,ZnO薄膜硅微压电矢量水听器, 声学学报, 2016,41(3),273-280
  6. 任伟,赵修臣,李俊红(通讯作者),汪承灏,0-3 法制备 PZT 厚膜及其性能研究,人工晶体学报 , 2015,44(6),1551-1556
  7. Junhong Li,Wei Ren,Chenghao,Wang,Mengwei Liu,Guoxiang Fan, Micro-patterning of PZT thick film by lift-off using ZnO a sasacrificial layer, Ceramics International, 2015,41(6),7325-7328
  8. Junhong Li, Chenghao Wang, Jun Ma, Mengwei Liu, Micromachined Ultrasonic Transducers Based on Lead Zirconate Titanate (PZT) Films, Microsystem Technologies, 2013, 19(2), 211-218 
  9. Junhong Li , Chenghao Wang, Mengwei Liu, Jun Ma, Effect of Annealing Process on Properties of Pb (Zr0.52Ti0.48)O3 Thin Films Prepared by Sol-Gel Method, Ferroelectrics, 2013, 445, 32-38 
  10. LI Jun-Hong, WANG Cheng-Hao, XU Lian, XIE Shu, Pt/Ti electrodes of PZT thin films patterning by novel lift-off using ZnO as a sacrificial layer, Chinese Physics Letters, 2008, 25(1), 310-313 
  11. 李俊红,汪承灏,黄歆,徐联,PZT薄膜的制备及其与MEMS工艺的兼容性研究,半导体学报,2006,27(10),1176-1780 
  12. 李俊红,汪承灏,刘梦伟,马军,魏建辉,基于圆形振动膜的MEMS压电传声器研究,机械工程学报,2012,48(18),85-88