真空蒸镀Nd:YAG薄膜的工艺研究

Study on the Process of Nd:Y₃Al₅O₁₂ Thin Films by Evaporation Deposition

摘要: 本文采用真空电子束蒸发镀膜工艺制备Nd:YAG薄膜，结合XRD、SEM等手段分析研究不同衬底材料、镀膜材料以及退火温度对薄膜材料结构的影响，并分析测试了Nd:YAG薄膜的光致发光特性。镀膜材料为Nd:YAG粉体块，Si片上沉积的Nd:YAG薄膜材料，经1100˚C退火后，具有单一YAG晶相结构，薄膜结晶晶粒均匀细小，并在室温下测试获得1064 nm主荧光峰的宽带荧光光谱。

Abstract: Nd:YAG thin films have been prepared by electron beam evaporation deposition in the study. The influences of different substrates, different coating materials and annealing temperatures on the structures of Nd:YAG thin films were investigated with XRD and SEM. Also, the optical properties of Nd:YAG thin films were characterized by spec-trophotometer. The Nd:YAG thin films deposited on Si from Nd:YAG powder blocks have single YAG crystal structure after annealing at 1100˚C. And the grains of the thin film are uniform and fine. In addition, the photoluminescence spectra of Nd:YAG thin films were measured at room temperature, and photoluminescence spectrum in the region of 1064 nm peak was detected.