基于游标效应的飞秒激光直写波导温度传感器
Femtosecond Laser Direct Writing Waveguide Temperature Sensor Based on Vernier Effect
DOI: 10.12677/jsta.2025.132020, PDF,   
作者: 陶天龙, 刘书辉, 柯志宏, 王子杰：武汉工程大学光电信息与能源工程学院、数理学院，武汉
关键词: 飞秒激光刻波导；马赫–曾德尔干涉仪；游标效应；Femtosecond Laser Direct Writing； Temperature Sensor； Vernier Effect
摘要: 本文提出了一种基于游标效应的飞秒激光直写波导温度传感器。通过利用飞秒激光直写波导技术，在单模光纤(SMF)中制备了两个自由光谱范围(FSR)相近的马赫–曾德尔干涉仪(MZI)。光纤内的波导能够将光纤芯内传输的光耦合出来，并引导其沿着包层传输，最终再耦合回纤芯。波导内传输的光与纤芯内传输的光发生干涉，形成马赫–曾德尔干涉仪(MZI)。通过级联两个MZI，利用游标效应实现了温度灵敏度的放大。在进行传感MZI和级联传感器的温度实验后，发现传感器的温度灵敏度由−17.9 pm/℃提升至−94.6 pm/℃，灵敏度放大因子为5.2。该传感器具有结构紧凑、鲁棒性强的特点，展现出广泛的应用前景。
Abstract: This article proposes a femtosecond laser direct writing waveguide temperature sensor based on the vernier effect. Two Mach Zehnder interferometers (MZIs) with similar free spectral range (FSR) were fabricated in a single-mode fiber (SMF) using femtosecond laser direct writing waveguide technology. Light propagating in the fiber core is coupled out partially to the waveguide and traveling along a path in the fiber cladding region before being coupled back into the fiber core, thus forming an MZI. And temperature sensitivity amplification was achieved by cascading two MZIs to generate a vernier effect. Temperature experiments were conducted on both MZI and cascaded sensors, and the temperature sensitivity of the sensors was amplified from −17.9 pm/˚C to −94.6 pm/˚C, with an amplification factor of 5.2. Such a sensor has a compact structure, good robustness, and broad application prospects.
文章引用：陶天龙, 刘书辉, 柯志宏, 王子杰. 基于游标效应的飞秒激光直写波导温度传感器[J]. 传感器技术与应用, 2025, 13(2): 200-210. https://doi.org/10.12677/jsta.2025.132020

参考文献

[1] Velázquez-González, J.S., Monzón-Hernández, D., Moreno-Hernández, D., Martínez-Piñón, F. and Hernández-Romano, I. (2017) Simultaneous Measurement of Refractive Index and Temperature Using a Spr-Based Fiber Optic Sensor. Sensors and Actuators B: Chemical, 242, 912-920. [Google Scholar] [CrossRef] 
[2] Chen, Q., Wang, D.N. and Gao, F. (2021) Simultaneous Refractive Index and Temperature Sensing Based on a Fiber Surface Waveguide and Fiber Bragg Gratings. Optics Letters, 46, 1209-1212. [Google Scholar] [CrossRef] [PubMed]
[3] Jing, L., Liu, B., Liu, D., Liu, D., Wang, F., Guan, C., et al. (2024) Femtosecond Laser Inscribed Excessively Tilted Fiber Grating for Humidity Sensing. Sensors, 24, Article 342. [Google Scholar] [CrossRef] [PubMed]
[4] Zhao, R., Liu, H. and Shu, X. (2023) High-performance Vector Torsion Sensor Based on High Polarization-Dependent In-Fiber Mach-Zehnder Interferometer. Optics Express, 31, 8844-8854. [Google Scholar] [CrossRef] [PubMed]
[5] Yin, X.L., Wang, N., Yu, X.D., et al. (2021) Theoretical Analysis and Optimization of Extrinsic Fabry-Perot Interferometer Optical-Fiber Humidity-Sensor Structures. Current Optics and Photonics, 5, 652-659.
[6] Xu, B., He, J., Du, B., Xiao, X., Xu, X., Fu, C., et al. (2021) Femtosecond Laser Point-By-Point Inscription of an Ultra-Weak Fiber Bragg Grating Array for Distributed High-Temperature Sensing. Optics Express, 29, 32615-32626. [Google Scholar] [CrossRef] [PubMed]
[7] Tian, Q., Xin, G., Lim, K., He, Y., Liu, J., Ahmad, H., et al. (2020) Cascaded Fabry-Perot Interferometer-Regenerated Fiber Bragg Grating Structure for Temperature-Strain Measurement under Extreme Temperature Conditions. Optics Express, 28, 30478-30488. [Google Scholar] [CrossRef] [PubMed]
[8] Liu, Y., Li, X., Zhang, Y. and Zhao, Y. (2021) Fiber-optic Sensors Based on Vernier Effect. Measurement, 167, Article ID: 108451. [Google Scholar] [CrossRef] 
[9] 朱熙平. 基于游标效应的高灵敏度光纤传感器[D]: [硕士学位论文]. 黄石: 湖北师范大学, 2024.
[10] Dai, D. (2009) Highly Sensitive Digital Optical Sensor Based on Cascaded High-Q Ring-Resonators. Optics Express, 17, 23817-23822. [Google Scholar] [CrossRef] [PubMed]
[11] Shao, L., Luo, Y., Zhang, Z., Zou, X., Luo, B., Pan, W., et al. (2015) Sensitivity-Enhanced Temperature Sensor with Cascaded Fiber Optic Sagnac Interferometers Based on Vernier-Effect. Optics Communications, 336, 73-76. [Google Scholar] [CrossRef] 
[12] Liao, H., Lu, P., Fu, X., Jiang, X., Ni, W., Liu, D., et al. (2017) Sensitivity Amplification of Fiber-Optic In-Line Mach-Zehnder Interferometer Sensors with Modified Vernier-Effect. Optics Express, 25, 26898-26909. [Google Scholar] [CrossRef] [PubMed]
[13] Yao, T., Pu, S., Zhao, Y. and Li, Y. (2019) Ultrasensitive Refractive Index Sensor Based on Parallel-Connected Dual Fabry-Perot Interferometers with Vernier Effect. Sensors and Actuators A: Physical, 290, 14-19. [Google Scholar] [CrossRef] 
[14] Wang, Z., Huang, L., Liu, C., Wang, H., Sun, S. and Yang, D. (2019) Sensitivity-enhanced Fiber Temperature Sensor Based on Vernier Effect and Dual In-Line Mach-Zehnder Interferometers. IEEE Sensors Journal, 19, 7983-7987. [Google Scholar] [CrossRef] 
[15] Theodosiou, A., Ioannou, A. and Kalli, K. (2019) All-In-Fiber Cladding Interferometric and Bragg Grating Components Made via Plane-By-Plane Femtosecond Laser Inscription. Journal of Lightwave Technology, 37, 4864-4871. [Google Scholar] [CrossRef] 
[16] Choi, H.Y., Kim, M.J. and Lee, B.H. (2007) All-Fiber Mach-Zehnder Type Interferometers Formed in Photonic Crystal Fiber. Optics Express, 15, 5711-5720. [Google Scholar] [CrossRef] [PubMed]
[17] Yang, W., Wu, T., Wu, Z., Wang, X., Shum, P.P., Wang, X., et al. (2022) In-Line Mach-Zehnder Interferometer and Bragg Grating Integrated by Femtosecond Laser for Discrimination of Temperature and Directional Torsion. Optics Express, 30, 41933-41942. [Google Scholar] [CrossRef] [PubMed]
[18] Hou, L., Zhao, C., Xu, B., Mao, B., Shen, C. and Wang, D.N. (2019) Highly Sensitive PDMS-Filled Fabry-Perot Interferometer Temperature Sensor Based on the Vernier Effect. Applied Optics, 58, 4858-4865. [Google Scholar] [CrossRef] [PubMed]
[19] Zhang, J., Liao, H., Lu, P., Jiang, X., Fu, X., Ni, W., et al. (2018) Ultrasensitive Temperature Sensor with Cascaded Fiber Optic Fabry-Perot Interferometers Based on Vernier Effect. IEEE Photonics Journal, 10, 1-11. [Google Scholar] [CrossRef] 
[20] Lei, X. and Dong, X. (2019) Sensitivity-Enhanced Fiber Interferometric High Temperature Sensor Based on Vernier Effect. Photonics and Education in Measurement Science 2019, Jena, 17-19 September 2019, 17-19. [Google Scholar] [CrossRef] 

为你推荐