基于LTCC工艺的高密度单通孔双旋横向温差发电器件设计

Design of a High-Density Lateral Thermoelectric Generator with Single-Via and Double-Spiral Based on LTCC Technology

摘要: 本文基于低温共烧陶瓷(LTCC)工艺，提出一种高密度并行排列的单通孔双螺旋横向温差发电器(TEG)结构。该结构热电臂采用螺旋环绕式横向布局，温差冷热源在纵向通过短距离高导热银柱交替排列在热电偶两侧，减少热流在非发电区域的扩散损耗。为解决单螺旋横向热电阵列存在的低功率密度问题，通过构建高密度双螺旋热电单元级联架构，共享上下电极实现整体并行发电，有效提升能量收集效率。实验结果表明所制备的160对热电偶双螺旋横向TEG其输出电压可达213.8 mV。在温差为200 K的测试条件下，所提器件的功率输出可达1328.7 μW。与传统单螺旋横向TEG相比，该双螺旋电感型TEG的发电性能提升幅度达72.83%。本工作为大功率器件或芯片的原位供能提供额外解决方案。

Abstract: In this work, based on the Low Temperature Co-fired Ceramic (LTCC) technology, we propose a high-density parallel-arranged single-via double-spiral lateral Thermoelectric Generator (TEG) structure. The thermoelectric arms of this structure adopt a spiral-wound lateral layout, and the cold and heat sources are alternately arranged on both sides of the thermocouples through short-distance high-thermal-conductivity silver pillars in the longitudinal direction, which suppresses the diffusion loss of heat flux in non-power-generating regions. To address the intrinsic low power density issue of the single-spiral lateral thermoelectric array, we construct a high-density cascaded architecture of double-spiral thermoelectric units. This architecture realizes overall parallel power generation through shared upper and lower electrodes, and effectively improves the energy harvesting efficiency. Experimental results demonstrate that the fabricated double-spiral lateral TEG integrated with 160 pairs of thermocouples achieves an output voltage of up to 213.8 mV. Under a test temperature difference (ΔT) of 200 K, the proposed device delivers a maximum output power of 1328.7 μW. Compared with the conventional single-helix lateral TEG, the power generation performance of this double-helix inductive TEG is improved by 72.83%. This work provides an alternative technical solution for the in-situ power supply of high-power devices and chips.