基于像元微观仿真的面阵CCD激光饱和与串扰机制研究

Research on Laser Saturation and Crosstalk Mechanisms of Area Array CCD Based on Pixel-Level Micro-Simulation

摘要: 行间转移型电荷耦合器件(CCD)在强激光辐照下极易产生致眩与串扰现象，严重制约了光电探测系统的成像质量。本文针对1064 nm连续波激光对硅基面阵CCD的干扰效应展开了系统性的微观机理仿真与宏观实验研究。首先，基于半导体器件物理理论，利用COMSOL软件构建了CCD光电转换区及垂直转移沟道(VCCD)的二维数值模型，微观剖析了光生载流子的产生、聚集以及势阱满阱后的多级溢出物理过程。在此基础上，搭建了以1064 nm连续波激光器、索雷博PM200高精度功率计(配合S130VC探头)以及内置SHARP RJ33J3AA0DT传感器的面阵CCD相机为核心的激光干扰实验测试平台。借助MATLAB软件对采集的系列干扰图像进行精准的灰度值提取与光斑分布特征分析，定量揭示了随入射激光功率增加，CCD由单像元饱和依次向第一类、第二类及第三类串扰现象递进的演化规律。研究结果表明，不同功率密度下的宏观串扰图像特征与微观层面的垂直/水平沟道电荷级联溢出机制高度吻合。本研究将微观多物理场仿真与宏观光学实验相统一，为面阵CCD的抗激光干扰效能评估及光电防护设计提供了坚实的理论依据与实验数据支撑。

Abstract: Interline transfer charge-coupled devices (CCDs) are highly prone to dazzling and crosstalk phenomena under intense laser irradiation, which severely restricts the imaging quality of photoelectric detection systems. In this paper, systematic microscopic mechanism simulations and macroscopic experimental research were conducted on the interference effects of 1064 nm continuous-wave lasers on silicon-based area-array CCDs. Firstly, based on semiconductor device physics theory, a two-dimensional numerical model of the CCD photoelectric conversion region and vertical transfer channel (VCCD) was constructed using COMSOL software, microscopically analyzing the generation and accumulation of photogenerated carriers, as well as the physical process of multi-stage overflow after reaching the full-well capacity. On this basis, a laser interference experimental test platform was established, with a 1064 nm continuous-wave laser, a Thorlabs PM200 high-precision power meter (equipped with an S130VC probe), and an area-array CCD camera integrating a SHARP RJ33J3AA0DT sensor as the core components. Utilizing MATLAB software, precise grayscale value extraction and spot distribution characteristic analysis were performed on the acquired series of interference images, quantitatively revealing the evolutionary progression of the CCD advancing from single-pixel saturation sequentially to Type I, Type II, and Type III crosstalk phenomena with the increase of incident laser power. The research results indicate that the macroscopic crosstalk image characteristics under different power densities are highly consistent with the microscopic mechanism of charge cascading overflow in the vertical and horizontal channels. By unifying microscopic multi-physics simulations with macroscopic optical experiments, this study provides a solid theoretical basis and experimental data support for the evaluation of anti-laser interference efficacy and the design of photoelectric protection for area-array CCDs.