污染物尺寸对光学元件激光损伤的影响
The Influence of Pollutant Size on Laser Damage of Optical Components
摘要: 基于时域有限差分法(FDTD)，构建355 nm、1064 nm和355 nm &1064 nm复合波长激光辐照下污染物诱导激光损伤的数值模型。研究三种波长结构下，熔石英光学元件表面微纳污染物(Fe、Cu、Al2O3、CeO2)对光场调制及损伤特性的影响，分析激光波长、污染物种类、颗粒尺寸及分布对光场调制峰值、峰值位置及元件损伤演化规律的作用机制。单颗粒体系研究表明，相同条件下复合波长的光场调制效应显著强于单波长，调制最强点集中于光学元件表面。多颗粒体系模拟结果表明，调制效应强弱与污染物材料、分布有关，金属的光场调制强度与温升效应均强于金属氧化物，在特定尺寸和粒子分布情况下Fe表现出最高的热量沉积效率。本研究揭示了污染物介电特性、空间分布与激光参数的耦合作用机制，为高功率激光装置中熔石英光学元件的污染控制策略优化及抗损伤结构设计提供了理论依据与技术支撑。
Abstract: Based on the finite-difference time-domain method (FDTD), a numerical model of pollutant-induced laser damage under the irradiation of 355 nm, 1064 nm, and 355 nm & 1064 nm composite wavelength lasers was established. The effects of micro-nano pollutants (Fe, Cu, Al2O3, CeO2) on the surface of fused quartz optical components on light field modulation and damage characteristics under the three wavelength configurations were studied. The mechanisms of laser wavelength, pollutant type, particle size, and distribution on the peak value of light field modulation, peak position, and the damage evolution law of components were analyzed. Studies on the single-particle system show that under the same conditions, the light field modulation effect of the composite wavelength is significantly stronger than that of the single wavelength, and the strongest modulation point is concentrated on the surface of the optical component. The simulation results of the multi-particle system indicate that the intensity of the modulation effect is related to the pollutant material and distribution. The light field modulation intensity and temperature rise effect of metals are stronger than those of metal oxides, and Fe exhibits the highest heat deposition efficiency under specific sizes and particle distribution conditions. This study reveals the coupling mechanism between the dielectric properties of pollutants, spatial distribution, and laser parameters, and provides a theoretical basis and technical support for the optimization of pollution control strategies and the design of anti-damage structures for fused quartz optical components in high-power laser devices.
文章引用：李旭, 陈垦. 污染物尺寸对光学元件激光损伤的影响[J]. 应用物理, 2026, 16(4): 294-302. https://doi.org/10.12677/app.2026.164027

参考文献

[1] Liu, Y., Liu, L., Tang, W., Shao, J., Li, X., Sun, J., et al. (2020) Experimental Study on the Damage of Optical Materials by Out of Band Composite Laser. Applied Sciences, 10, Article 3578. [Google Scholar] [CrossRef] 
[2] Pan, Q., Wang, K., Han, J. and Ma, B. (2025) Damage Dynamics and Relaxation Process of Double Pulses with Nanosecond Laser. Photonics Research, 13, Article 2246. [Google Scholar] [CrossRef] 
[3] Miao, J., Zhu, C., Hasi, W., Niu, J., Kang, S., Dan, Z., et al. (2025) Study of Convexity on Nanosecond Laser-Induced Damage Growth in Fused Silica. Optics & Laser Technology, 192, Article 113478. [Google Scholar] [CrossRef] 
[4] Béziat, L., Roquin, N. and Lamaignère, L. (2024) Multishot Laser Damage of Multilayer Dielectric Mirrors in the Near-Infrared Subpicosecond Regime. Applied Optics, 63, 5403-5410. [Google Scholar] [CrossRef] 
[5] Li, X., Dou, X., Zhu, H., Hu, Y. and Wang, X. (2020) Nanosecond Laser-Induced Surface Damage and Its Mechanism of CaF2 Optical Window at 248 Nm KrF Excimer Laser. Scientific Reports, 10, Article 5550. [Google Scholar] [CrossRef] [PubMed]
[6] Wang, L., Ma, W., Ji, L. and Zhao, D. (2012) Influence of Metal Particles on Damage Threshold of Fused Silica at 3ω. Chinese Journal of Lasers, 39, Article 0502004. [Google Scholar] [CrossRef] 
[7] Jiang, Y., Liu, H., Zhang, F., Zhang, B., Liao, W., Zhang, L., et al. (2021) Influence of Ejected SiO2 Particles on the Laser Damage Thresholds of Fused Silica. Fusion Engineering and Design, 173, Article 112956. [Google Scholar] [CrossRef] 
[8] Li, Y., Li, L., Wei, H., Li, X., Wang, Y., Pan, S., et al. (2025) Cerium Contamination on Silicon Carbide Optics during CMP: TOF-SIMS, XPS Characterization, and Reaxff MD Simulation. Applied Surface Science, 703, Article 163390. [Google Scholar] [CrossRef] 
[9] Bennett, J.M. (2020) Contamination on Optical Surfaces-Concerns, Prevention, Detection, and Removal. In: Mittal, K.L., Ed., Particles on Surfaces, CRC Press, 101-110. [Google Scholar] [CrossRef] 
[10] Han, K., Yan, B.Z., Xu, X.J. and Liu, Z.J. (2016) Thermal Damage Mechanism of the Optical Element Used in Mid-Infrared High Power Laser System. Journal of Infrared and Millimeter Waves, 35, 741-746.
[11] Ding, K.Y., He, C.T., Liu, Z.G., Xiao, J., Feng, G.Y., Zhou, K.N., et al. (2023) Research on Particulate Contamination Induced Laser Damage of Optical Material Based on Integrated Spectroscopy. Spectroscopy and Spectral Analysis, 43, 1234-1241.
[12] Ding, W., Zhao, L., Chen, M., Cheng, J., Yin, Z., Liu, Q., et al. (2024) Concentration Characterization of Underlying Intrinsic Defects Accompany with Surface Structural Defects and Their Effect on Laser Damage Resistance. Applied Surface Science, 643, Article 158678. [Google Scholar] [CrossRef] 
[13] Shao, Z.C., Ling, X.L., Chen, X.B. and Chen, X. (2024) Research on Suppression Technology for Coupling Damage of Organic Pollution and Defect. High Power Laser and Particle Beams, 36, Article 121004.
[14] Murray, M., Naydenova, I. and Martin, S. (2023) Review of Recent Advances in Photosensitive Polymer Materials and Requirements for Transmission Diffractive Optical Elements for LED Light Sources. Optical Materials Express, 13, 3481-3501. [Google Scholar] [CrossRef] 
[15] Ma, B., Guan, S., Yan, D., Pan, Q., Hou, Z., Wang, K., et al. (2024) The Influence of Space Environmental Factors on the Laser-Induced Damage Thresholds in Optical Components. High Power Laser Science and Engineering, 12, e47. [Google Scholar] [CrossRef] 
[16] Tong, Y.J., Liu, F., Fan, J.D., Jin, L.M., Dong, X.H., Yu, X.J., et al. (2022) Effect of Optics Contamination on X-Ray Free-Electron Laser Beam Quality. Acta Optica Sinica, 42, Article 1134006. [Google Scholar] [CrossRef] 
[17] Lin, P., Mah, M., Randi, J., DeFrances, S., Bernot, D. and Talghader, J.J. (2021) High Power and Contamination Properties of All-Silica High Reflectivity Multilayers. IEEE Photonics Journal, 13, Article 2200407. [Google Scholar] [CrossRef] 
[18] Han, Y., Peng, X., Wan, S., Cao, z., Chen, H., Li, H., et al. (2024) Numerical Simulation and Experimental Validation of Light Modulation by Laser-Ablated Ripples on Fused Silica Surfaces. Optics Express, 33, 169-188. [Google Scholar] [CrossRef] [PubMed]
[19] Shi, Z., Sun, L., Shao, T., Liu, H., Huang, J., Ye, X., et al. (2022) Statistically Correlating Laser-Induced Damage Performance with Photothermal Absorption for Fused Silica Optics in a High-Power Laser System. Photonics, 9, Article 137. [Google Scholar] [CrossRef] 
[20] Hou, L., Yin, F., Wang, S., Sun, J. and Yin, H. (2024) A Review of Thermal Effects and Substrate Damage Control in Laser Cleaning. Optics & Laser Technology, 174, Article 110613. [Google Scholar] [CrossRef] 
[21] Dover, N.P., Nishiuchi, M., Sakaki, H., Kondo, K., Alkhimova, M.A., Faenov, A.Y., et al. (2020) Effect of Small Focus on Electron Heating and Proton Acceleration in Ultrarelativistic Laser-Solid Interactions. Physical Review Letters, 124, Article 084802. [Google Scholar] [CrossRef] [PubMed]
[22] You, C., Dai, S., Zhang, P., Xu, Y., Wang, Y., Xu, D., et al. (2017) Mid-Infrared Femtosecond Laser-Induced Damages in As2S3 and As2Se3 Chalcogenide Glasses. Scientific Reports, 7, Article No. 6497. [Google Scholar] [CrossRef] [PubMed]
[23] Yu, X., Xu, J. and Zhang, B. (2018) Thermal Melting Damage of Thin Film Components Induced by Surface Impurities and Nodule Defects. Infrared and Laser Engineering, 47, Article 1243003. [Google Scholar] [CrossRef] 
[24] Liu, F., Jiao, H., Ma, B., Paschel, S., Balasa, I., Ristau, D., et al. (2020) Influence of the Surface and Subsurface Contaminants on Laser-Induced Damage Threshold of Anti-Reflection Sub-Wavelength Structures Working at 1064 Nm. Optics & Laser Technology, 127, Article 106144. [Google Scholar] [CrossRef] 
[25] Chen, X., Ali, S., Yuan, L., Guo, F., Huang, G., Shi, W., et al. (2022) Characterization and Source Analysis of Heavy Metals Contamination in Microplastics by Laser-Induced Breakdown Spectroscopy. Chemosphere, 287, Article 132172. [Google Scholar] [CrossRef] [PubMed]
[26] Honig, J., Norton, M.A., Hollingsworth, W.G., Donohue, E.E. and Johnson, M.A. (2004) Experimental Study of 351-Nm and 527-Nm Laser-Initiated Surface Damage on Fused Silica Surfaces Due to Typical Contaminants. SPIE Proceedings, Boulder, 20-22 September 2004, 129-136. [Google Scholar] [CrossRef] 
[27] Palmier, S., Garcia, S., Lamaignère, L., Loiseau, M., Donval, T., Rullier, J.L., et al. (2006) Surface Particulate Contamination of the LIL Optical Components and Their Evolution under Laser Irradiation. SPIE Proceedings, Boulder, 25-27 September 2006. [Google Scholar] [CrossRef] 
[28] Zhang, Z.L. and Su, J.H. (2021) Simulation and Reconstruction of 3D Microscopic Morphology of Damaged Optical Film Surface. Acta Optica Sinica, 41, Article 0212002. [Google Scholar] [CrossRef] 
[29] Kafka, K.R.P. and Demos, S.G. (2019) Interaction of Short Laser Pulses with Model Contamination Microparticles on a High Reflector. Optics Letters, 44, 1844-1847. [Google Scholar] [CrossRef] [PubMed]
[30] Demos, S.G., Lambropoulos, J.C., Negres, R.A., Matthews, M.J. and Qiu, S.R. (2019) Dynamics of Secondary Contamination from the Interaction of High-Power Laser Pulses with Metal Particles Attached on the Input Surface of Optical Components. Optics Express, 27, 23515-23525. [Google Scholar] [CrossRef] [PubMed]
[31] Zhang, S., Menoni, C., Gruzdev, V. and Chowdhury, E. (2022) Ultrafast Laser Material Damage Simulation—A New Look at an Old Problem. Nanomaterials, 12, Article 1259. [Google Scholar] [CrossRef] [PubMed]
[32] Bulgakov, A.V., Sládek, J., Hrabovský, J., Mirza, I., Marine, W. and Bulgakova, N.M. (2024) Dual-Wavelength Femtosecond Laser-Induced Single-Shot Damage and Ablation of Silicon. Applied Surface Science, 643, Article 158626. [Google Scholar] [CrossRef] 
[33] Yang, Z., Zhang, Y., Chen, Y., Li, X., Jiang, Y., Feng, Z., et al. (2022) Simultaneous Detection of Multiple Gaseous Pollutants Using Multi-Wavelength Differential Absorption Lidar. Optics Communications, 518, Article 128359. [Google Scholar] [CrossRef] 
[34] Yang, Z., Chen, J., Wang, L., Yang, L., Li, Y., Wu, Z., et al. (2024) Composite Scattering Characteristics Analysis of Micro-Ellipsoidal Periodic Structure Optical Surface and Microdefects. Heliyon, 10, e36039. [Google Scholar] [CrossRef] [PubMed]
[35] Wang, P.C., Zhang, S., Shen, C.B., Zhan, J.T., Duan, J., Li, Y.C., et al. (2023) Multiple Scattering Transmission Characteristic of Polarized Light in Ellipsoidal Fine Particles. Chinese Optics, 16, 348-357. [Google Scholar] [CrossRef] 
[36] Palik, E.D. (1985) Handbook of Optical Constants of Solids. Academic Press.

为你推荐