ZnO纳米线基MEMS传感器的制备及丙酮检测性能研究

Preparation and Acetone Detection Performance of ZnO Nanowire-Based MEMS Sensor

摘要: 为开发低功耗、高灵敏度的适用于丙酮检测器件，采用水热法合成氧化锌纳米线(ZnO NWs)，将其与微机电系统(MEMS)基板结合制备出ZnO NWs/MEMS丙酮气体传感器。通过X射线衍射仪、扫描电子显微镜表征材料物相结构与微观形貌，利用气敏分析系统测试传感器丙酮检测性能。结果表明ZnO NWs为纯相六方纤锌矿结构，呈一维线性形貌；该传感器最佳工作电压为1.8 V，在此条件下对20 ppm丙酮的响应时间为20 s、恢复时间为102 s，对20~100 ppm丙酮的响应值与浓度呈现出良好的线性关系(R² > 98.48%)，理论最低检测限低至0.27 ppb，该传感器对丙酮具有优异选择性，对乙醇、甲醛等结构相似VOCs及H₂、CO、NH₃等常见气体的响应值显著低于丙酮。为环境监测、工业安全管控及糖尿病无创诊断等丙酮检测领域具有实际应用价值。

Abstract: To develop a low-power, high-sensitivity device for acetone detection, zinc oxide nanowires (ZnO NWs) were synthesized via a hydrothermal method and integrated with a micro-electro-mechanical system (MEMS) substrate to fabricate a ZnO NWs/MEMS acetone gas sensor. The phase structure and microscopic morphology of the material were characterized by X-ray diffractometer and scanning electron microscope, and the acetone detection performance of the sensor was tested by a gas-sensing analysis system. The results showed that the ZnO NWs possessed a pure hexagonal wurtzite structure with a one-dimensional linear morphology. The optimal operating voltage of the sensor was 1.8 V, under which the response time and recovery time for 20 ppm acetone were 20 s and 102 s, respectively. The response values of the sensor exhibited a good linear relationship with acetone concentrations in the range of 20~100 ppm (R² > 98.48%), and the theoretical limit of detection was as low as 0.27 ppb. Additionally, the sensor demonstrated excellent selectivity for acetone, with its response values to structurally similar volatile organic compounds (VOCs) such as ethanol and formaldehyde, as well as common gases including H₂, CO and NH₃, being significantly lower than that to acetone. It has practical application value in acetone detection fields such as environmental monitoring, industrial safety control, and non-invasive diagnosis of diabetes.