高性能SnO2/NaTaO3 MEMS湿度传感器
High-Performance SnO2/NaTaO3 MEMS Humidity Sensor
DOI: 10.12677/ms.2026.164086, PDF,    科研立项经费支持
作者: 熊刘燕, 高 云*：湖北大学材料科学与工程学院，湖北 武汉
关键词: SnO2/NaTaO3； MEMS器件；湿度传感器；SnO2/NaTaO3； MEMS Devices； Humidity Sensors
摘要: 本研究采用两步水热法成功制备了SnO2/NaTaO3复合浆料，并将其应用于MEMS湿度传感器件。通过系统实验对比发现，相较于纯SnO2和纯NaTaO3，SnO2/NaTaO3复合材料表现出显著增强的湿度敏感特性，灵敏度提升达3~4倍，同时保持良好的长期稳定性。性能优化机制主要源于SnO2与NaTaO3的协同复合效应：两相复合促进电荷从NaTaO3向SnO2转移，有效提升了表面水的吸附和解吸附能力。动力学测试进一步表明，该复合材料具有快速的响应–恢复特性，响应时间和恢复时间分别为70 s和95 s，均优于单一组分材料。本研究不仅简化了高性能湿度敏感材料的制备流程，更为MEMS湿度传感器的实用化提供了可靠的技术支撑。
Abstract: In this study, SnO2/NaTaO3 composite slurry was successfully prepared via a two-step hydrothermal method and applied to MEMS humidity sensors. Systematic experimental comparisons revealed that, compared with pure SnO2 and pure NaTaO3, the SnO2/NaTaO3 composite exhibited significantly enhanced humidity sensing performance with a 3~4 fold improvement in sensitivity while maintaining good long-term stability. The performance optimization mechanism primarily originated from the synergistic effect between SnO2 and NaTaO3: the two-phase composite facilitated charge transfer from NaTaO3 to SnO2, effectively enhancing the water adsorption and desorption capability on the surface. Kinetic tests further demonstrated that the composite material possessed rapid response-recovery characteristics, with response and recovery times of 70 s and 95 s, respectively, both superior to those of the single-component materials. This study not only simplifies the preparation process of high-performance humidity-sensitive materials but also provides reliable technical support for the practical application of MEMS humidity sensors.
文章引用：熊刘燕, 高云. 高性能SnO2/NaTaO3 MEMS湿度传感器[J]. 材料科学, 2026, 16(4): 202-212. https://doi.org/10.12677/ms.2026.164086

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