飞秒激光制备微纳结构的研究现状
Micro-Nanostructures Fabrication Utilizing Femtosecond Laser: A Review
摘要: 得益于微纳结构表面独特的功能特性及其在各个领域的广泛应用，设计和制备表面微纳结构已成为当前重要研究方向之一。飞秒激光微纳加工作为一种先进的制造技术，凭借其“冷加工”、极高峰值功率和极强的三维加工能力，可对任意材料实现跨尺度精密加工，展现出显著的工业化应用潜力。本文系统综述了飞秒激光微纳结构制备的最新进展，首先回顾了飞秒激光与物质相互作用的基本理论，并引入双温模型及高空间频率条纹(HSFL)的多种形成机理假说以深化机理阐述。进而分类总结了飞秒激光制备亚微米周期结构、纳米孔阵列及微纳复合结构的典型方法与机理。在此基础上，本文通过量化技术对比，重点探讨了飞秒激光微纳加工在产业化进程中面临的工艺稳定性、加工效率、成本控制及规模化制备等关键工程挑战，并展望了通过智能化控制、在线监测与工艺优化等技术路径推动其走向实用化的发展方向，以期为该领域的研究与工程应用提供参考。
Abstract: Owing to the unique functional characteristics and wide applications of micro-nanostructured surfaces, the design and fabrication of surface micro-nanostructures have become one of the important research directions. As an advanced manufacturing technology, femtosecond laser micro-nano processing enables cross-scale precision processing of any material by virtue of its cold processing, extremely high peak power and strong three-dimensional processing capability, showing significant industrial application potential. This paper systematically reviews the recent progress in femtosecond laser fabrication of micro-nanostructures. Firstly, the basic theory of femtosecond laser-matter interaction is reviewed, and the two-temperature model and various hypotheses for the formation mechanism of high-spatial-frequency LIPSS (HSFL) are introduced to elaborate the mechanism. Then, the typical methods and mechanisms of femtosecond laser fabrication of submicron periodic structures, nanopore arrays and micro-nano composite structures are summarized by category. On this basis, through quantitative technical comparison, the key engineering challenges in the industrialization process of femtosecond laser micro-nano processing are discussed, including process stability, processing efficiency, cost control and large-scale preparation. Finally, the development direction of promoting its practical application through intelligent control, on-line monitoring and process optimization is prospected, so as to provide reference for the research and engineering application in this field.
文章引用：娄鑫鑫. 飞秒激光制备微纳结构的研究现状[J]. 应用物理, 2026, 16(4): 424-438. https://doi.org/10.12677/app.2026.164039

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