镓铟纳米颗粒材料的可控制备及其透射式微焦点X射线源性能研究

Controllable Preparation of GaIn Nanoparticle Materials and Their Performance in a Transmission Microfocus X-Ray Source

摘要: 镓铟合金纳米颗粒材料兼具低熔点、组分可调和复合特征辐射输出特征，在透射式微焦点X射线源中具有潜在应用价值。本文以氮化硅衬底上可控沉积的GaIn纳米颗粒靶材为研究对象，采用电子显微学成像、CASINO模拟和自主设计的X光显微成像系统开展其作为焦点X射线源的应用研究。显微学结果表明，代表性颗粒内部Ga与In信号高度重叠。20 keV电子束入射下，能量沉积和特征X射线产生区域主要集中在近表层微米尺度范围，Ga K系与In L系特征辐射可在同一作用区内形成。基于不同横向尺寸颗粒靶的成像实验获得了清晰稳定的镍铬螺线管透射投影图像，定量结果表明系统几何保持稳定，而条纹调制保持能力随颗粒横向尺寸出现分化。结构表征、模拟分析与成像统计在同一成分窗口内形成了系统性对应关系。综合结果表明，该镓铟纳米颗粒体系能够在近表层稳定形成复合辐射发射区，具备作为透射式微焦点X射线源候选靶材的巨大应用潜力。

Abstract: GaIn nanoparticle materials combine low melting point, compositional tunability, and composite characteristic radiation output, and therefore show potential application value as target materials for transmission microfocus X-ray sources. In this work, GaIn nanoparticle targets controllably deposited on SiNx membranes were investigated by electron microscopy imaging, CASINO simulation, and a self-designed X-ray microscopic imaging system. The microscopy results confirm strong overlap of Ga and In signals within representative particles. Under 20 keV electron irradiation, the main regions of energy deposition and characteristic X-ray generation are confined to a near-surface micrometer-scale zone, where Ga K-series and In L-series characteristic radiation can be produced simultaneously. Imaging experiments based on GaIn particle targets with different lateral dimensions yielded clear and stable transmission projection images of a Ni-Cr solenoid sample, and the quantitative results indicate that the system geometry remains stable, while the ability to maintain fringe modulation varies with the lateral dimension of the particles. Structural characterization, simulation analysis, and imaging statistics form a systematic correspondence within the same composition window. These results indicate that GaIn nanoparticle materials can stably form a near-surface composite radiation emission zone and are promising candidate target materials for transmission microfocus X-ray sources.