基于石墨烯膜的微小管道内压力测量方法研究

Research on a Pressure Measurement Method for Microchannels Based on a Graphene Membrane

摘要: 文章针对微小管道内流体压力测量问题，设计了一种基于石墨烯膜的法布里–珀罗(F-P)腔结构的压力测量方法，并搭建实验平台进行验证。在液体静止条件下开展压力标定实验，获得了压力与输出电压之间的关系曲线。实验结果表明，传感器输出信号随压力变化呈周期性特征，在45~54 kPa范围内具有较好的单调性与近似线性关系，其中通道1与通道2的线性拟合系数分别达到0.98465和0.99654。随后进行了线性趋势验证实验，两个通道归一化结果与理论变化趋势基本一致。结果验证了该测量方法在微小管道压力检测中的可行性，可为石墨烯膜光纤压力传感结构在微尺度流体检测中的应用提供参考。

Abstract: This study addresses the challenge of fluid pressure measurement inside micro-channels by proposing a Fabry-Pérot (F-P) cavity-based pressure measurement method utilizing a graphene membrane and validates the approach through an experimental platform. Pressure calibration experiments were carried out under static liquid conditions to obtain the relationship between pressure and output voltage. The experimental results showed that the sensor output signal exhibited periodic characteristics with pressure variation and presented good monotonicity and approximate linearity within the pressure range of 45~54 kPa. The linear fitting coefficients of channel 1 and channel 2 reached 0.98465 and 0.99654, respectively. Subsequently, linear trend verification experiments were conducted, and the normalized results of the two channels were generally consistent with the theoretical variation trend. The results verified the feasibility of the proposed method for pressure measurement in microchannels and provided a reference for the application of graphene membrane optical fiber pressure sensing structures in microscale fluid detection.