气溶胶喷印银膜换能元的制备与电爆特性研究

Fabrication and Electrical Explosion Characteristics of Aerosol Jet Printed Silver-Film Transducers

摘要: 针对传统薄膜换能元制备工艺复杂、加工周期较长等问题，采用气溶胶喷印技术制备银膜桥式换能元，并对焊盘打印路径和桥区结构进行优化。通过对比蛇形与回形焊盘填充路径以及圆弧桥、菱形桥和V形桥3种桥区结构的成形与电爆特性，确定蛇形填充焊盘和圆弧桥结构为优化方案。在此基础上，对烧结后银膜的厚度及电学性能进行定量表征。四探针测试结果表明银膜方阻约为0.67 Ω/sp，轮廓仪测得膜层厚度约为5 μm，据此计算电导率约为2.99 × 10⁵ S·m⁻¹。同时对换能元表面形貌及微观结构进行表征，并开展电容放电电爆与起爆实验。优化后的换能元结构完整，桥区电爆位置主要集中于中心区域；在5.12 mJ储能条件下实现桥区电爆，并成功引爆三硝基间苯二酚铅(LTNR)。该研究为MEMS微型起爆系统中薄膜换能元的制造与集成化应用提供参考。

Abstract: To address the complex fabrication process and long processing time associated with conventional thin-film transducers, aerosol jet printing was employed to fabricate silver-film bridge transducers, and the pad printing path and bridge structure were optimized. The forming and electrical explosion characteristics of serpentine and loop pad-filling paths, as well as three bridge structures, namely arc-shaped, rhombus-shaped, and V-shaped bridges, were comparatively investigated. The serpentine pad-filling path and arc-shaped bridge were selected as the optimized configuration. After sintering, the silver film was quantitatively characterized. The four-point probe and profilometer measurements gave a sheet resistance of approximately 0.67 Ω/sp and a film thickness of approximately 5 μm, respectively, corresponding to an electrical conductivity of approximately 2.99 × 10⁵ S·m⁻¹. The surface morphology and microstructure of the transducers were also characterized, followed by capacitor-discharge electrical explosion and initiation tests. The optimized transducers exhibited good structural integrity, with electrical explosion mainly occurring in the central region of the bridge. Electrical explosion was achieved at a capacitor stored energy of 5.12 mJ, successfully initiating lead trinitroresorcinate (LTNR). This study provides a reference for the fabrication and integration of thin-film transducers in MEMS-based initiation systems.