SnO₂:Nb复合薄膜的制备及光电性能研究

Preparation and Photoelectric Properties of SnO₂:Nb Composite Thin Films

摘要: 采用溶胶–凝胶法制备SnO₂:Nb复合溶胶，使用旋涂法将其镀于普通玻璃片上，经干燥、热处理制得均匀的SnO₂:Nb复合薄膜，其它条件不变，探究不同Nb掺杂量、热处理温度对样品薄膜结构、形貌以及光学、电学性质的影响。采用XRD、XPS、SEM等技术手段对所制得的薄膜进行表征。结果表明：煅烧温度为500℃时，SnO₂:Nb薄膜微粒的结晶度较高，粒径小，膜层分布均匀；用紫外–可见分光光度计和四探针电阻仪对其进行光学、电学性能测试，UV-Vis光谱表明，SnO₂:Nb薄膜在近紫外光区吸光度有明显的增加，但随着Nb⁵⁺掺杂量的增加，薄膜吸光度呈现下降的趋势；电导率测试结果表明：Nb⁵⁺掺杂量为8% (物质的量)时，SnO₂:Nb复合薄膜的导电性最好。

Abstract: By using sol-gel method, SnO₂:Nb gel was prepared, and spin coating method was used to coat on glass substrates, which dried and calcined to obtain a homogeneous SnO₂:Nb composite films. Under the same experimental conditions, the different doping amount of niobium, calcination temperature on the structure and morphology of SnO₂:Nb film were discussed. By using XRD, XPS, SEM and other testing methods, the structure and morphology of SnO₂:Nb composite film were characterized. At 500˚C, the film particle had high crystallization and small size, and the surface of the film was well-distributed. Its optical and electrical properties were tested by the ultraviolet-visi- ble spectrophotometer and four-probe resistivity meter. UV-Vis spectra showed that SnO₂:Nb film absorbance in the near ultraviolet region had increased significantly, but the absorbance showed a downward trend with the increasing amount of Nb⁵⁺ doped; Conductivity analysis showed that Nb⁵⁺ doping amount of 8% (the amount of material), the conductivity of SnO₂:Nb composite films was best.