高密度垂直磁存储FePt颗粒薄膜媒质的研究

Study on FePt Granular Film for Perpendicular Magnetic Recording (PMR) Media with Ultra-High Density

摘要: 本文采用磁控溅射法在硅基片上生长FePt颗粒薄膜。FePt膜层下面为MgO籽层，以此引发薄膜的L10相fct织构。在FePt薄膜中掺入C可减小其颗粒尺寸。采用X射线衍射仪(XRD)、超导量子干涉仪(SQUID)和透射电镜(TEM)对FePt颗粒进行表征，结果表明制备的样品具有优良的L10相结构，其磁滞曲线表明方形度很好，而且垂直矫顽力能有26 kOe，颗粒大小为8.3 nm。高分辨透射电镜表征表明其优良的fct超晶格结构。该磁性薄膜有望应用于下一代高密度磁存储媒质。

Abstract: Magnetron sputtering was applied to grow FePt granular film on a silicon substrate. A MgO inter-layer was in-between the film and substrate to induce the L10 structure in the FePt alloy film with fct texture. The carbon addition helps reduce the grain size of the film. XRD, SQUID and TEM were applied to measure its structure, magnetic properties, and microstructures, respectively. Results show that the film has excellent L10 order, and the squareness of MH loop is close to unity, with a high perpendicular coercivity of 26 kOe. The microstructure shows that it has small grain size of 8.3 nm with uniform distribution. High-resolution TEM image shows extremely excellent super- lattice structure in the L10 phase. This film is expected to be a promising candidate for ultra-high density magnetic recording in the future.