钯–硅(Pd-Si)薄膜表面偏析研究
Surface Segregation in Pd-Si Thin Films
摘要: 本文应用修正的Darken模型，结合考虑薄膜尺寸效应的约束条件，对PdSi、Pd2Si、Pd3Si、Pd9Si2、Pd5Si合金薄膜的平衡态及动态表面偏析进行了模拟计算，其中，偏析参数，即偏析能ΔG和相互作用系数Ω，分别由Miedema模型和相图计算方法获得。结果表明：尺寸效应对Pd-Si合金薄膜体系偏析的影响不是很明显。
Abstract: In this paper, equilibrium and kinetic surface segregation in Pd-Si alloy thin films are simulated by applying the modified Darken model under a constrained condition for taking into account the size effect. The corresponding segregation parameters, i.e. segregation energy and interaction parame-ter, are obtained by the Miedema model and the CALPHAD (Calculation of Phase Diagrams) method. The simulated results indicate that the size effect in the Pd-Si alloy thin film is not pronounced.
文章引用：陈煜, 黄立豪, 杨士栋, 邹永恒, 姜国利, 王江涌. 钯–硅(Pd-Si)薄膜表面偏析研究[J]. 材料科学, 2016, 6(6): 334-345. https://dx.doi.org/10.12677/MS.2016.66044

参考文献

[1] Murarka, S.P. (1983) Silicides for VLSI Applications. Academic, New York, 133-147.
[2] Poate, J.M., Tu, K.N. and Mayer, J.W. (1978) Thin Films-Inter Diffusion and Reactions. John Wiley & Sons, New York.
[3] Abhaya, S. and Amarendra, G. (2004) Study of Surface Segregation of Si on Palladium Silicide Using Auger Electron Spectroscopy. Journal of Physics D: Applied Physics, 37, 3140-3144. http://dx.doi.org/10.1088/0022-3727/37/22/013 [Google Scholar] [CrossRef] 
[4] Lin, B., Jian, W. and Wang, J.Y. (2016) Understanding of Phase Transformation in Pd/a-Si Bilayered System. Journal of Alloys and Compounds, 665, 42-47. http://dx.doi.org/10.1016/j.jallcom.2016.01.093 [Google Scholar] [CrossRef] 
[5] Freeouf, J.L., Rubloff, G.W., Ho, P.S. and Kuan, T.S. (1979) Microscopic Compound Formation at the Pd-Si (111) Interface. Physical Review Letters, 43, 1836-1839. http://dx.doi.org/10.1103/PhysRevLett.43.1836 [Google Scholar] [CrossRef] 
[6] 沈波, 施一生, 赵特秀. Pi/c-Si界面反应研究[J]. 中国科学技术大学学报, 1990, 2(20): 143-148.
[7] Rubloff, G.W., Ho, P.S., Freeouf, J.F. and Lewis, J.E. (1981) Chemical Bonding and Reactions at the Pd/Si Interface. Physical Review B, 23, 4183-4196. http://dx.doi.org/10.1103/PhysRevB.23.4183 [Google Scholar] [CrossRef] 
[8] 颜心良, 王江涌. 二元合金薄膜的表面偏析[J]. 真空, 2012, 49(4): 63-67.
[9] Plessis, J. (1990) Surface Segregation. Sci-Tech Pub. Ltd., Chichester.
[10] Lide, D.R. (2003) Handbook of Chemistry and Physics 84TH. CRC Press Inc., Florida.
[11] Miedema, A.R., de Chatel, P.F. and de Boer, F.R. (1980) Cohesion in Alloys-Fundamentals of a Semi-Empirical Model. Physical B, 100, 1-28. http://dx.doi.org/10.1016/0378-4363(80)90054-6 [Google Scholar] [CrossRef] 
[12] Swaminarayan, S. and Srolovitz, D.J. (1996) Surface Segregation in Thin Films. Acta Materialia, 44, 2067-2072. http://dx.doi.org/10.1016/1359-6454(95)00282-0 [Google Scholar] [CrossRef] 
[13] de Boer, F.R., Boom, R., Mattens, W.C.M., Miedema, A.R. and Niessen, A.K. (1988) Cohesion in Metals: Transition Metals Alloys. North- Holland, Amsterdam, 676.
[14] Sommer, F., Singh, R.N. and Mittemeijer, E.J. (2009) Interface Thermodynamics of Nano-Sized Crystalline, Amorphous and Liquid Metallic Systems. Journal of Alloys and Compound, 467, 142-153. http://dx.doi.org/10.1016/j.jallcom.2007.11.106 [Google Scholar] [CrossRef] 
[15] Dinsdale, A.T. (1991) SGTE Data for Pure Elements. Calphad, 15, 317-425. http://dx.doi.org/10.1016/0364-5916(91)90030-N [Google Scholar] [CrossRef] 
[16] de Boer, F.R., Boom, R., Mattens, W.C.M., Miedema, A.R. and Niessen, A.K. (1988) Cohesion in Metals: Transition Metals Alloys. North-Holland, Amsterdam, 24.
[17] de Boer, F.R., Boom, R., Mattens, W.C.M., Miedema, A.R. and Niessen, A.K. (1988)Cohesion in Metals: Transition Metals Alloys. North-Holland, Amsterdam, 737.
[18] Baxi, H.C. and Massalski, T.B. (1991) Pd-Si Phase Diagram. Journal of Phase Equilibria, 12, 349-356. http://dx.doi.org/10.1007/BF02649925 [Google Scholar] [CrossRef] 
[19] Zhang, W., Smith, J.R. and Wang, X.G. (2004) Thermodynamic from Ab Initio Computations. Physical Review B, 70, 1-8. http://dx.doi.org/10.1103/PhysRevB.70.024103 [Google Scholar] [CrossRef] 
[20] 徐祖耀. 材料热力学[M]. 北京: 高等教育出版社, 2009.
[21] 郝士明. 材料热力学[M]. 北京: 化学工业出版社, 2004.
[22] 颜心良, 王江涌. 薄膜中表面偏析的研究[D]: [硕士学位论文]. 汕头: 汕头大学, 2012: 29.
[23] Du, Y. and Schuster, J.C. (1999) Experimental Investigations and Thermodynamic Descriptions of the Ni-Si and C-Ni- Si Systems. Metallurgical and Materials Transactions A, 30, 2409-2418. http://dx.doi.org/10.1007/s11661-999-0249-8 [Google Scholar] [CrossRef] 
[24] Du, Z.M., Guo, C.P., Yang, X.J. and Liu, T. (2006) A Thermodynamic Decription of the Pd-Si-C System. Inter- metallics, 14, 560-569. http://dx.doi.org/10.1007/s11661-999-0249-8 [Google Scholar] [CrossRef] 
[25] Abhaya, S., Amarendra, G., et al. (2004) Study of Surface Segregation of Si on Palladium Silicide Using Auger Electron Spectroscopy. Journal of Physics D: Applied Physics, 37, 3140-3144. http://dx.doi.org/10.1088/0022-3727/37/22/013 [Google Scholar] [CrossRef] 
[26] 颜心良, 王江涌. 薄膜中表面偏析的研究[D]: [硕士学位论文]. 汕头: 汕头大学, 2012: 38.

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