基于微型传感器的近场辐射传热实验方法研究
Studying on the Experimental Method of Near-Field Thermal Radiation Based on Micro Sensors
DOI: 10.12677/JSTA.2018.61003, PDF,    国家自然科学基金支持
作者: 冯 冲*, 张俊星, 施 展：大连民族大学信息与通信工程学院，辽宁 大连；唐祯安, 余 隽：大连理工大学电子信息与电气工程学部，辽宁省集成电路重点实验室，辽宁 大连
关键词: 微型传感器；二氧化硅；悬空薄膜；近场热辐射；Micro Sensor； Silicon Oxide； Freestanding Membrane Structure； Near-Field Thermal Radiation
摘要: 面向二氧化硅(SiO2)材料开展了近场辐射传热实验测量方法研究，其核心工作是近场热辐射传感器设计。首先，基于电磁波理论以两个平行的SiO2平板为对象分析近场热辐射的特性并以此确定近场热辐射传感器的关键参数；其次，根据近场热辐射的作用效果确定实验方案并设计相应的近场热辐射传感器；再次，基于经典传热理论确定实验模型，以及设计传感器的微加工工艺；最后，本实验方法在其他介质的近场辐射传热测量中的应用。
Abstract: The experimental method of near-field thermal radiation between two Silicon oxide (SiO2) plates was developed. The key work is the near-field thermal radiation (NFTR) sensor design. Firstly, the character of the near field thermal radiation between two parallel SiO2 plates was analyzed based on the electromagnetic wave theory, and the key parameter of the NFTR sensor was chosen. Se-condly, according to the difference effect of the thermal radiation emitter and the thermal radiation absorber, two kinds of experimental plan were made and the NFTR sensor was designed, separately. Thirdly, the experimental model was built by the classical heat transfer theory and the micromachining process of the NFTR sensor was developed. Finally, the experimental method was extended to evaluate the near-field thermal radiation between other medium.
文章引用：冯冲, 张俊星, 施展, 唐祯安, 余隽. 基于微型传感器的近场辐射传热实验方法研究[J]. 传感器技术与应用, 2018, 6(1): 21-30. https://doi.org/10.12677/JSTA.2018.61003

参考文献

[1] 西格尔, 等. 热辐射传热[M]. 北京: 科学出版社, 1990: 150-170.
[2] Cengel, Y.A., Klein, S. and Beckman, W. (1998) Heat Transfer: Apractical Approach. WBC McGraw-Hill, Boston.
[3] 刘静. 微米/纳米尺度传热学[M]. 北京: 科学出版社, 2001.
[4] Cravalho, E., Domoto, G. and Tien, C.L. (1968) Measurements of Thermal Radiation of Solids at Liquid-Helium Tem-perature. AIAA 3rd Thermophysics Conference. Los Angeles. [Google Scholar] [CrossRef] 
[5] Hargreaves, C. (1969) Anomalous Radiative Transfer between Closely-Spaced Bodies. Physics Letters A, 30, 491. [Google Scholar] [CrossRef] 
[6] Domoto, G., Boehm, R. and Tien, C.L. (1970) Experimental Investigation of Radiative Transfer between Metallic Surfaces at Cryogenic Temperatures. Journal of Heat Transfer, 8, 412. [Google Scholar] [CrossRef] 
[7] Rousseau, E., Siria, A., Jourdan, G., et al. (2009) Radiative Heat Transfer at the Nanos-cale. Nature Photonics, 3, 514. [Google Scholar] [CrossRef] 
[8] Wischnath, U.F., Welker, J., Munzel, M., et al. (2008) The Near-Field Scanning Thermal Microscope. The Review of Scientific Instruments, 79, Article ID: 073708. [Google Scholar] [CrossRef] [PubMed]
[9] Hu, L., Narayanaswamy, A., Chen, G., et al. (2008) Near-Field Thermal Radiation between Two Closely Spaced Glass Plates Exceeding Planck’s Blackbody Radiation Law. Applied Physics Letters, 92, Article ID: 133106. [Google Scholar] [CrossRef] 
[10] Feng, C., Tang, Z.A., Yu, J. and Sun, C.Y. (2013) A MEMS Device Capable of Mea-suring Near-Field Thermal Radiation between Membranes. Sensors, 13, 1998. [Google Scholar] [CrossRef] [PubMed]
[11] Rytov, S.M., Kravtsov, Y.A. and Tatarskii, V.I. (1988) Principles of Statistical Radiophysics 2. Springer-Verlag, Berlin, 30-130.
[12] Basu, S. and Zhang, Z. (2009) Maximum Energy Transfer in Near-Field Thermal Radiation at Nanometer Distances. Journal of Applied Physics, 105, Article ID: 093535. [Google Scholar] [CrossRef] 
[13] Loomis, J. and Maris, H. (1994) Theory of Heat Transfer by Evanescent Electromagnetic Waves. Physical Review B, 50, 18517-18524. [Google Scholar] [CrossRef] 
[14] Mulet, J.P., et al. (2002) Enhanced Radiative Heat Transfer at Nanometric Distances. Microscale Thermophysical Engineering, 6, 209-222. [Google Scholar] [CrossRef] 
[15] 冯冲. 微纳器件中近场热辐射现象及其测试技术研究[M]. 大连: 大连理工大学, 2013: 17-46.
[16] Narayanaswamy, A., Shen, S. and Chen, G. (2008) Near-Field Radiative Heat Transfer between a Sphere and a Substrate. Physical Review B, 78, Article ID: 115303. [Google Scholar] [CrossRef] 
[17] Fox, A.M. and Fox, M. (2001) Optical Properties of Solids. Vol. 1, Oxford University Press, New York, 35-75.
[18] Palik, E.D. and Ghosh, G. (1998) Handbook of Optical Constants of Solids. Vol. 3, Aca-demic Press, New York, 367-390.
[19] Fu, C. and Zhang, Z. (2006) Nanoscale Radiation Heat Transfer for Silicon at Different Doping Levels. International Journal of Heat and Mass Transfer, 49, 1703-1718. [Google Scholar] [CrossRef] 
[20] Song, Q., et al. (2004) An AC Microcalorimeter for Measuring Specific Heat of Thin Films. Microelectronics Journal, 35, 817-821. [Google Scholar] [CrossRef] 
[21] Mailly, F., et al. (2001) Anemometer with Hot Platinum Thin Film. Sensors and Actuators A: Physical, 94, 32-38. [Google Scholar] [CrossRef] 
[22] Zhang, F., et al. (2006) A Micro-Pirani Vacuum Gauge Based on Mi-cro-Hotplate Technology. Sensors and Actuators A: Physical, 126, 300-305. [Google Scholar] [CrossRef] 
[23] Tanaka, A., et al. (1996) Infrared Focal Plane Array Incorporating Silicon IC Process Compatible Bolometer. IEEE Transactions on Electron Devices, 43, 1844-1850. [Google Scholar] [CrossRef] 
[24] Liddiard, K.C. (2004) The Active Microbolometer: A New Concept in Infrared Detection. Microelectronics, MEMS, and Nanotechnology, Perth, December 2003, 5274.
[25] Feng, C., Tang, Z.A. and Yu, J. (2012) A Novel CMOS Device Capable of Measuring Near-Field Thermal Radiation. Chinese Physics Letters, 29, Article ID: 038502. [Google Scholar] [CrossRef] 
[26] Xuan, Y.M. (2014) An Overview of Micro/Nanoscaled Thermal Radiation and Its Applications. Photonics and Nanostructures—Fundamentals and Applications, 12, 93-113.

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