硅基集成Mach-Zehnder干涉仪的制备与性能研究

Research on the Fabrication and Performance of Silicon-Based Mach-Zehnder Interferometers

摘要: 硅基集成波导是光电子集成的一个重要平台，硅基集成Mach-Zehnder干涉仪是光滤波器、光开关、光调制器和波导传感器的一种重要形式。本文对硅基集成Mach-Zehnder干涉仪的设计、制备和性能测量进行了研究，通过仿真计算优化了波导耦合光栅的耦合效率，采用电子束直写技术和离子刻蚀技术实现了波导的高精度制备。测试结果显示器件的性能优良，端对端的传输损耗优于−10 dB，干涉仪的干涉输出对比度达到了32 dB，自由频谱范围为2.275 nm。

Abstract: The silicon based integrated waveguide is an important platform of the electrooptic integration. Because of the good performances, silicon based integrated Mach-Zehnder interferometers have become important forms of integrated optical filters, optical switches, optical modulators and waveguide sensors. In this paper, the design, fabrication and performance of the integrated Mach-Zehnder interferometer were researched. The coupling efficiency of the waveguide grating coupler was optimized by simulation. The device was fabricated by using electron lithography and ion etching technologies. Results show that an excellent device has been obtained with an end-to-end transmission loss better than −10 dB, an extinction ratio larger than 32 dB, and a free spectrum rang of 2.275 nm.