离子减薄仪技术改进及功能开发

Technical Improvement and Functional Development of Ion Beam Thinner

摘要: 离子减薄仪是一种用来制备透射电镜样品的设备，其原理是利用被电离的氩离子轰击样品表面，从而使样品减薄，达到透射电镜观察要求。页岩中的微孔隙及微裂缝是页岩气储存空间及流通通道，有重要的研究价值，然而页岩中的孔隙微小，多为纳米级，用传统的制样方法很难观察到。国外一些研究人员采用氩离子抛光制样方法，成功地观察到了页岩中的纳米级孔隙，由于国内当时还没有此类设备，我们把我实验室原有的离子减薄仪进行开发，成功地实现了氩离子抛光的功能，满足了科研需求。

Abstract: Ion beam thinner is a kind of equipment to prepare samples of transmission electron microscope (TEM). The principle of Ion beam thinner is using the ionized argonto to bombard the surface of samples, then the samples are thinning down. Micro pores and micro fractures are storage space and circulation passage, and there is very important research value. The micro pores and micro fractures are so small, that they are difficult to be observed by scanning electron microscope (SEM) in conventional method of sample preparation. Some foreign researchers adopt the ion-milled equipment to process the surface of samples, to smooth the surface, and then it is easy to see the nano-pores and nano-fractures in the sample with SEM. At that time, there isn’t such equipment in China, so we transformed the Ion beam thinner, and realized the function of ion-milling of shale samples, and met the demand of shale gas research.