大功率隧道结级联半导体激光器研究进展
Research Progress in High Power Cascade Lasers with Tunnel Junctions
DOI: 10.12677/OE.2018.84020, PDF,  被引量   
作者: 文振宇, 李建军, 曹红康, 袁泽旭, 王梦欢:北京工业大学信息学部,省部共建光电子技术教育部重点实验室,北京
关键词: 大功率隧道结半导体激光器级联High Power Tunnel Junction Semiconductor Laser Cascade
摘要: 对半导体隧道级联激光器的发展近况和技术突破以及工艺优化进行分析总结,着重介绍了大功率半导体隧道级联激光器在研究领域的部分性能的优化以及创新点。
Abstract: This article analyzes the development of cascade semiconductor lasers with tunnel junctions, technological breakthroughs and process optimization, and highlights some of the optimization and innovation of high-power semiconductor tunnel cascade lasers in the research field.
文章引用:文振宇, 李建军, 曹红康, 袁泽旭, 王梦欢. 大功率隧道结级联半导体激光器研究进展[J]. 光电子, 2018, 8(4): 149-157. https://doi.org/10.12677/OE.2018.84020

参考文献

[1] 李辉, 曲轶, 张剑家, 辛德胜, 刘国军. 高功率905nm InGaAs隧道结串联叠层半导体激光器[J]. 强激光与粒子束, 2013, 25(10): 2517-2520.
[2] 李建军, 崔碧峰, 邓军, 韩军, 刘涛, 李佳莼, 计伟, 张松. 非对称超大光腔980nm大功率半导体激光器[J]. 中国激光, 2013, 40(11): 63-67.
[3] Boucher, J.-F.,Vilokkinen, V.,Rainbow, P. (2009) Ultra High Efficiency 1550 nm Multi-Junction Pulsed Laser Diodes. Proceedings of SPIE—The International Society for Optical Engineering, 7480, 74800K.
[4] Garcia, J.C., Rosencher, E., Collot, P., et al. (1997) Epitaxially Stacked Lasers with Esaki Junctions: A Bipolar Cascade Laser. Applied Physics Express, 71, 3752. [Google Scholar] [CrossRef
[5] Okawara, S., Aoki, Y., Kuwabara, M., et al. (2017) Nitride-Based Stacked Laser Diodes with a Tunnel Junction. Applied Physics Express, 11, 012701. [Google Scholar] [CrossRef
[6] van der Ziel, J.P. and Tsang, W.T. (1982) Integrated Multilayer GaAs-Lasers Separated by Tunnel-Junctions. Applied Physics Letters, 41, 499-501.
[7] Patterson, S.G., Petrich, G.S., Ram, R.J. and Kolodziejski, L.A. (1999) Continuous-Wave Room Temperature Operation of Bipolar Cascade Laser. Electronics Letters, 35, 395. [Google Scholar] [CrossRef
[8] Patterson, S.G., Lau, E.K., Pipe, K.P. and Ram, R.J. (2000) Temperature Characteristics of Bipolar Cascade Lasers. Applied Physics Letters, 77, 172. [Google Scholar] [CrossRef
[9] Siskaninetz, W., Ehret, J.E., Dang, T.N., et al. (2002) Reduced Power Consumption in GaAs-Based Bipolar Cascade Lasers. Electronics Letters, 38, 1259-1261.
[10] Yan, J.Z., Cai, J.X., Ru, G.Y., et al. (2006) InGaAsP-InP Dual-Wavelength Bipolar Cascade Lasers. IEEE Photonics Technology Letters, 18, 1777-1779.
[11] Nekorkin, S.M., Biryukov, A.A., Demina, P.B., et al. (2007) Nonlinear Mode Mixing in Dual-Wavelength Semiconductor Lasers with Tunnel Junctions. Applied Physics Letters, 90, 171106. [Google Scholar] [CrossRef
[12] Muller, M., Philippens, M., Gronninger, G., et al. (2007) Monolithically Stacked High-Power Diode Laser Bars in Quasi-Continuous-Wave Operation Exceeding 500 W. Proceedings Volume 6456, High-Power Diode Laser Technology and Applications V, 64561B.
[13] Feng, M.X., Liu, J.P. and Zhang, S.M. (2013) High Efficient GaN-Based Laser Diodes with Tunnel Junction. Applied Physics Letters, 103, 043508. [Google Scholar] [CrossRef
[14] Yonkee, B.P., Young, E.C., Lee, C., et al. (2016) Demonstration of a III-Nitride Edge-Emitting Laser Diode Utilizing a GaN Tunnel Junction Contact. Optics Express, 24, 7816-7822. [Google Scholar] [CrossRef
[15] Kanskar, M. (2017) High Power and High Efficiency 1.8-kW Pulsed Diode Laser Bar. Journal of Photonics for Energy, 7, 016003. [Google Scholar] [CrossRef
[16] Skierbiszewski, C., Muziol, G., Nowakowskiszkudlarek, K., et al. (2018) True-Blue Laser Diodes with Tunnel Junctions Grown Monolithically by Plasma-Assisted Molecular Beam Epitaxy. Applied Physics Express, 11, 034103. [Google Scholar] [CrossRef
[17] https://www.laserdiode.com/
[18] https://www.lasercomponents.com/en/
[19] https://www.osram.com/os/
[20] 廉鹏, 殷涛, 高国, 邹德恕, 陈昌华, 李建军, 沈光地, 马骁宇, 陈良惠. 新型多有源区隧道再生光耦合大功率半导体激光器[J]. 物理学报, 2000(12): 2374-2377.
[21] 邹德恕, 崔碧峰, 李建军, 廉鹏, 徐晨, 韩金茹, 刘莹, 杜金玉, 张丽, 高国, 沈光地. 隧道带间耦合级联新型激光器扩展电流的优化[J]. 光电子•激光, 2001(10): 989-991.
[22] 邹德恕, 廉鹏, 李建军, 徐晨, 韩军, 俞波, 刘莹, 张丽, 崔碧峰, 高国, 沈光地. 带间耦合多有源区大功率980nm半导体激光器[J]. 光电子•激光, 2003(2): 111-113.
[23] 李建军, 韩军, 邓军, 崔碧峰, 廉鹏, 邹德恕, 沈光地. 隧道再生四有源区大功率半导体激光器[J]. 光学学报, 2006(12): 1819-1822.
[24] 陈宏泰, 张世祖, 杨红伟, 林琳, 王晓燕, 花吉珍, 刘英斌, 安振峰. 高斜率效率隧道结叠层激光器的研制[J]. 微纳电子技术, 2008(5): 260-263.
[25] 林琳, 陈宏泰, 安志民, 车相辉, 王晶. 900nm三叠层隧道级联激光器的结构优化研究[J]. 微纳电子技术, 2010, 47(7): 397-400.
[26] 车相辉, 宁吉丰, 张宇, 赵润, 任永学, 陈宏泰. 大功率900nm超大光腔三叠层隧道级联激光器[J]. 半导体技术, 2014, 39(6): 423-427.
[27] 陈健, 廖柯, 熊煜, 周勇, 刘尚军. 大功率单隧道结半导体激光器的研制[J]. 半导体光电, 2018, 39(3): 345-349.
[28] 李建军, 沈光地, 郭伟玲, 廉鹏, 韩军, 邓军, 邹德恕. 新型隧道带间级联双波长半导体激光器[J]. 中国激光, 2003(11): 961-964.
[29] 司东海, 李建军, 付莹莹, 邓军, 韩军. 905nm隧道带间级联非耦合双有源区半导体激光器[J]. 光电子•激光, 2016, 27(2): 139-144.