基于傅立叶变换法的子口径抛光去除函数修正特性分析

Analysis of the Correction Characteristics of Sub-Aperture Polishing Function Based on Fourier Transform

摘要: 光学元件的超精密子口径抛光过程中，仿真加工与实际加工过程不一致将导致收敛出现反复，多次迭代冗余加工反而降低元件表面精度与收敛效率。本文基于傅立叶变化法分析子口径抛光去除函数的修正特性，针对其修正能力提出基于算法的修正补偿，通过在“非线性系统”下建立去除函数的动态补偿仿真模型，使得仿真过程更加符合实际，提高了确定性抛光过程的准确有效性，为超高精度面形误差修正工艺提供了关键技术支撑。

Abstract: For optical ultra-precision sub-aperture polishing, the inconsistency between simulation and ac-tual processing will affect the convergence of surface error, and reduce the machining accuracy and efficiency. In this paper, it analyzed the correction feature of remove function. For the algo-rithm compensation, the dynamic compensation simulation model of the removal function is es-tablished under the “nonlinear system”, which makes the simulation process more accurate. The determination of the polishing process is improved by compensation, which provides the key technical support for ultrahigh precision surface error correction process.