二氧化碲晶体混合低温等离子体表面改性技术制备光学薄膜
Preparation of Optical Thin Film by Hybird-Low Temperature Plasma Surface Modification of Tellurium-Dioxide Crystal
摘要: 由于二氧化碲(TeO2)晶体具有优良的声光特性，因此广泛应用于声光可调滤波器。本文以TeO2为衬底设计并研制了1300 nm~3400 nm波段超宽带减反射膜。但是由于TeO2晶体各向异性，从而导致膜层牢固度差，无法满足使用要求。文章采用混合低温等离子体表面改性技术来提高超宽带减反射光学薄膜在TeO2表面沉积的牢固度，通过实验验证，在相同薄膜沉积条件下，采用混合低温离子体处理过的TeO2薄膜附着力更好。有效解决TeO2表面薄膜附着力差的问题，满足附着力检测要求。
Abstract: Tellurium dioxide (TeO2) crystal for its excellent acousto-optic features was widely used in acousto-optic tunable filter. The 1300 - 3400 nm ultra-broad band anti-reflection film has been designed and fabricated on TeO2 acousto-optic crystal. Due to the TeO2 crystal anisotropy, it leads to poor adhesion of the film easy stripping. In this paper, the surface modification technology by hybird-low temperature plasma is used to improve the adhesion of ultra-wide band reduced re-flection optical film deposited on the surface of TeO2. Through experimental verification, under the same process conditions, the adhesion was better prepared by hybird-low temperature plasma. It solves the problem of stripping and meets the corresponding requirements of adhesion test.
文章引用：潘永刚, 付秀华, 张程. 二氧化碲晶体混合低温等离子体表面改性技术制备光学薄膜[J]. 材料科学, 2019, 9(1): 25-31. https://doi.org/10.12677/MS.2019.91004

参考文献

[1] Xu, R., He, Z.P., Zhang, H., et al. (2012) Calibration of Imaging Spectrometer Based on Acousto-Optic Tunable Filter(AOTF). Proceedings of SPIE, 8528.
[2] Chung, H. and Amoild, M.A. (2000) Near-Infrared Spectroscopy for Monitoring Starch Hydrolysis. Applied Spectroscopy, 54, 277-283. [Google Scholar] [CrossRef] 
[3] 刘子毓, 候玉文, 许强, 等. AOTF近红外光谱技术及在食安领域的应用[J]. 光电技术应用, 2012, 27(1): 25-28.
[4] Ahmed, M.M., Hogarth, C.A. and Khan. M.N. (1984) A Study of GeO2-TeO2 Glass System. Journal of Materials Science, 19, 4040-4044.
[5] 付秀华, 潘永刚, 董军, 等. 用热应力方法研究二氧化碲晶体表面连接层的特性[J]. 光子学报, 2016, 45(1): 0131001-1~0131001-5.
[6] Vasiliev, M., Win, A.T. and Pobol, I. (2014) New Applications of the Beam-Plasma Systems for the Materials Production. International Journal of Nanotechnology, 11, 660-668.
[7] Vasiliev, M. and Win, A.T. (2015) Generation and Applications of Electron-Beam Plasma Flows. Journal of Physics: Conference Series, 591, 012051. [Google Scholar] [CrossRef] 
[8] Qiu, H.-T. (2002) Collisional Effects on the Radio-Frequency Sheath Dynamics. Journal of Applied Physics, 51, 1332-1337.
[9] Meyer-Plath, A.A., Schroder, K. and Frinke, B. (2003) Current Trends in Biomaterial Surface Functionalization-Nitrogen-Containing Plasma Assited Processes with Enhanced Selectivity. Vacuum, 71, 391-407. [Google Scholar] [CrossRef] 
[10] Meyer-Plath, A.A., Finke, B. and Schroder, K. (2003) Pulsed and cw Microwave Plasma Excitation for Surface Functionalization in Nitrogen-Containig Gases. Surface and Coatings Technology, 174-175, 877-881. [Google Scholar] [CrossRef] 
[11] Martinez, A.J., Manolache, S., et al. (2000) Immonbilized Biomolecules on Plasma Functionalized Cellophane. I. Covalently Attached α-Chymotrypsin. Journal of Biomaterials Science, Polymer Ediyion, 11, 415-438. [Google Scholar] [CrossRef] [PubMed]
[12] Ganapathy, R., Manolache, S., Sarmadi, M., et al. (2001) Immobilization of Papain on Cold-Plasma-Functionalized Polythyele and Glass Surface. Journal of Biomaterials Science. Polymer Edition, 12, 1207-1049.
[13] 田继文, 陈敏, 李长敏, 等. 低温等离子体对生物材料表面改性固定生物分子的研究进展[J]. 材料导报, 2005, 1(3): 10-12.
[14] 付秀华, 潘永刚, 刘冬梅, 等. 光谱探测中的超宽带减反射膜[J]. 光子学报, 2015, 44(8): 0831001-1~0831001-5.

为你推荐