利用ToF-SIMS和Rf-GDOES深度剖析技术研究柔性衬底上的隔热多层膜

Study of Thermal-Protective Multilayer Films on Flexible Substrate by ToF-SIMS and Rf-GDOES Depth Profiling

摘要: 目的：探究隔热多层膜VG1的层结构和光学性能。方法：利用飞行时间二次离子质谱(Time of Flight Secondary Ion Mass Spectroscopy, ToF-SIMS)和射频辉光放电发射光谱(Radio-Frequency Glow Dis-charge Optical Emission Spectroscopy, Rf-GDOES)深度剖析技术，对PET柔性衬底上的隔热多层膜进行了成分分布和层结构的对比研究。利用Mixing-Roughness-Information (MRI)模型对测量的深度剖析谱进行了定量分析，并利用分光光度计对多层膜的光学性能进行表征。结果：通过深度剖析的定量分析，确定了所研究隔热多层膜主要组成元素的成分随深度变化的分布为：Nb₂O₅ (~25 nm)/AZO (Ag) (~10 nm)/Nb₂O₅ (~50 nm)/AZO (Ag) (~10 nm)/Nb₂O₅ (~25 nm)，整个薄膜厚度约为120 nm。利用深度剖析数据拟合获得的粗糙度参数随深度变化的关系，估算出ToF-SIMS和Rf-GDOES深度剖析溅射到第二个Ag峰前界面处的粗糙度分别为1.2 nm和4.6 nm。对透过率的表征发现，该多层膜样品较PET衬底可见光的透过率增加了11%，而红外光的透过率降低了66%。结论：利用Rf-GDOES和ToF-SIMS溅射深度剖析定量分析技术，确定了柔性衬底上隔热功能薄膜的元素成分分布、膜厚及膜层间界面粗糙度，并利用分光光度计定量确定了该隔热功能多层膜的透过率。

Abstract: In this paper, the elemental in-depth distribution, the layer structure and the optical properties of the thermal-protective multilayer films on flexible PET substrates are explored by using the Time of Flight Secondary Ion Mass Spectroscopy (ToF-SIMS) and the Radio-frequency Glow Discharge Optical Emission Spectroscopy (Rf-GDOES) depth profiling techniques. The measured depth profiling data are quantitatively analyzed by using the Mixing-Roughness-Information (MRI) model. The results show that the investigated thermal-protective multilayer structure is composed as Nb₂O₅ (~25 nm)/AZO (Ag) (~10 nm)/Nb₂O₅ (~50 nm)/AZO (Ag) (~10 nm)/ Nb₂O₅ (~25 nm) with the total thickness of ~120nm. The roughness values at the first interface of the second Ag peak are around 1.2 nm and 4.6 nm, respectively, for ToF-SIMS and Rf-GDOES depth profiling. By spectrophotometer, it shows that the transmittance of the investigated films increases by 11% for visible light and decreases by 66% for infrared light as compared with the PET substrate.