ZnO基紫外探测器的研究
Study on ZnO-Based UV Detector
摘要: 随着光电子技术的快速发展，紫外探测器广泛应用在军事和民用两大领域。其中ZnO基紫外探测器以其高耐辐射性，高饱和漂移率，高击穿电压和低生长温度等优势成为目前科学探究领域的新热潮。由于光电探测器的性能强烈依赖于材料的结构和光学性质。因此，本文基于国内外ZnO基紫外探测器的发展现状，综合介绍了光电导型紫外探测器、p-n结型紫外探测器和肖特基型紫外探测器典型结构的性质特点，归纳了化学气相沉积、激光脉冲沉积、水热法等不同制膜方法制备紫外探测器的光学性质。最后详细阐述了一种基于溶胶凝胶法制备制备的紫外探测器实现快速反应与强响应度，一种加装ZnO滤波层实现强选择性的ZnO基紫外探测器。通过对比分析总结出未来ZnO基紫外探测器将向着柔性、自供能、可调谐探测发展。
Abstract: With the rapid development of optoelectronic technology, UV photodetectors are widely used in military and civilian fields. Among them, zinc oxide (ZnO) has been regarded as a promising candidate for UV photodetector for its strong radiation tolerance, high saturated drift rate, high breakdown voltage and low growth temperature. Since the performance of photodetectors is strongly dependent on the structural and optical properties of the material. Therefore, based on the development status of ZnO-based UV detectors at home and abroad, this paper introduces the characteristics of the typical structure of photoconductive ultraviolet detector, p-njunction UV detector and Schottky UV detector, optical properties of UV detectors prepared by different membrane methods such as laser pulse deposition and hydrothermal method. Finally, a UV detector prepared by sol-gel method is described in detail to achieve rapid response and strong responsivity. A ZnO-based UV detector with high spectrum selectivity ZnO filter layer is proposed. Through comparative analysis, it is concluded that the future ZnO-based UV detector will develop towards flexible, self-powered, tunable detection.
文章引用：李天清, 闫珺. ZnO基紫外探测器的研究[J]. 应用物理, 2019, 9(2): 101-111. https://doi.org/10.12677/APP.2019.92012

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