ITO靶材烧结行为研究
Study on Sintering Behavior of ITO Target
DOI: 10.12677/MS.2019.98093, PDF,   
作者: 刘秉宁：稀有金属特种材料国家重点实验室，宁夏 石嘴山；赵 旭, 孙本双*, 陈 杰：郑州大学，河南省资源与材料工业技术研究院，河南 郑州；黄誓成：洛阳晶联光电材料有限责任公司，河南 洛阳；朱桂胜：桂林电子科技大学，材料科学与工程学院，广西 桂林；赵学义：北京九州新科科技有限公司，北京；王广欣*：河南科技大学，材料科学与工程学院，河南 洛阳
关键词: ITO靶材；无压烧结；致密化；微观组织；二次相结构；ITO Target； Normal Pressure Sintering； Densification； Microstructure； Second Phase Structure
摘要: 本文采用氧气氛无压烧结技术制备了高密度ITO靶材，对高密度ITO靶材的烧结过程进行了研究，分析了不同烧结条件下ITO靶材的微观组织和二次相结构，探讨了高密度ITO靶材的烧结致密化机理。
Abstract: High-density ITO target was prepared by oxygen-free atmosphere sintering technique. The sin-tering process of high-density ITO target was studied. The microstructure and secondary structure of ITO target under different sintering conditions were analyzed. The mechanism of sintering den-sification of high density ITO targets was discussed.
文章引用：刘秉宁, 赵旭, 孙本双, 黄誓成, 陈杰, 朱桂胜, 赵学义, 王广欣. ITO靶材烧结行为研究[J]. 材料科学, 2019, 9(8): 749-759. https://doi.org/10.12677/MS.2019.98093

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