提高钯–银合金薄膜附着力的研究
Study on Improving Adhesion of Pd-Ag Alloy Films
DOI: 10.12677/MS.2019.98096, PDF,    科研立项经费支持
作者: 耿志挺*, 符萌媛, 胡昕宇：清华大学材料学院，北京
关键词: 钯–银合金薄膜；附着力；传感器；Pd-Ag Alloy Films； Adhesion； Sensors
摘要: 钯及其合金膜在基体上的附着力是影响气敏薄膜稳定性和寿命的一个重要因素。对于钯–银合金薄膜传感器，其使用寿命直接受到附着性能好坏的影响。本文先利用磁控溅射在陶瓷基体上生长一层Ta2O5过渡层，然后再在其上沉积钯–银合金薄膜，有效地增强了钯–银合金薄膜与基底结合的牢固性，提高了传感器的使用寿命。
Abstract: The adhesion of Pd and its alloy films on the substrate is an important factor affecting the stability and life of gas sensitive films. For Pd-Ag alloy thin film sensors, their service life is directly affected by the adhesion performance. In this paper, the Ta2O5 transition layer was grown on the ceramic substrate by magnetron sputtering, and then Pd-Ag alloy film was deposited on it. This method ef-fectively strengthens the bonding between Pd-Ag alloy film and the substrate and improves the service life of the sensor.
文章引用：耿志挺, 符萌媛, 胡昕宇. 提高钯–银合金薄膜附着力的研究[J]. 材料科学, 2019, 9(8): 774-779. https://doi.org/10.12677/MS.2019.98096

参考文献

[1] 刘俊峰, 陈侃松, 王爱敏, 等. 氢气传感器的研究进展[J]. 传感器与微系统, 2009, 28(8): 8-11.
[2] 肖友文, 谢贵久, 王玉明, 等. 钯–铬合金电阻氢气传感器研究[J]. 载人航天, 2012, 18(5): 78-81.
[3] 冯颖, 王敏. 微型钯–银氢气传感器的制备与应用研究[D]: [硕士学位论文]. 杭州: 浙江大学, 2006.
[4] 陶长元, 唐金晶, 杜军, 等. 氢敏材料及氢气传感器的研究进展[J]. 材料导报, 2005, 19(2): 9-11.
[5] Polishchuka, V., Souteyranda, E., Martina, J.R., Strikha, V.I. and Skryshevsky, V.A. (1998) A Study of Hydrogen Detection with Palladium Modified Porous Silicon. Analytica Chimica Acta, 375, 205-210. [Google Scholar] [CrossRef] 
[6] Bangar, M.A., Ranmanathan, K., Yun, M., et al. (2004) Controlled Growth of a Single Palladium Nanowire between Micro-Fabricated Electrodes. Chemistry of Materials, 16, 4995-4959. [Google Scholar] [CrossRef] 

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