基于CdS薄膜的柔性光探测器研究

CdS Film-Based Flexible Photodetectors

摘要: 本文采用电子束蒸发镀膜法在PET柔性衬底上制备出基于CdS薄膜的柔性光探测器。PET对高温有敏感性，利用电子束蒸发镀膜方法可以在低温下制备出CdS薄膜。运用XRD、拉曼光谱和AFM对PET上CdS薄膜进行表征，结果表明所制备的薄膜致密性好、性能优异。批量制备器件，在偏压为1 V，光功率为365 nm的紫外光源照射条件下进行光响应性能测试，获得的光电流为0.347 μA，响应度达到17.35 A/W。对器件在不同弯曲应变下进行测试。统计测试数据显示CdS薄膜柔性光探测器件在0.08%~0.12%应变下，弯曲前后光电流变化较小，表明CdS薄膜柔性光探测器在应变为~0.1%下性能稳定。

Abstract: CdS film-based flexible photodetectors were fabricated by depositing CdS films on flexible PET substrate in combination with evaporating the Au/Cr electrodes using the shadow mask. PET is sensitive to high temperature and films can be deposited at low temperature by e-beam evaporation method. The as-produced CdS films were characterized by XRD, Raman and AFM, and the results show that the preparation of CdS films with good compactness has been succeeded on PET by e-beam evaporation method. The photoresponse properties were tested under the irradiation of a 365 nm ultraviolet light with power of 1 mW/cm2 under a bias voltage of 1 V. The obtained photocurrent and calculated responsivity are 0.347 μA and 17.35 A/W, respectively. Finally, the devices were tested under bending with different strains for 1 h. The statistics results show that the photocurrents of the CdS film-based flexible photodetectors have little to no change before and after bending under the strain of 0.08% to 0.12%, indicating that the devices have stable performance under the strain of ~0.1%.