ZnO/多孔硅复合薄膜的光学性能
Optical Properties of ZnO/Ps Composity Films
摘要: 采用金属辅助化学刻蚀(MACE)法制备不同的多孔硅衬底，溶胶–凝胶法以醋酸锌(Zn(CH3COO)2•2H2O)、无水乙醇作为前驱液制备ZnO/多孔硅复合薄膜。借助扫描电子显微镜(SEM)、X射线衍射(XRD)、光致发光谱(PL)等手段，对ZnO/多孔硅复合薄膜的表面形貌、晶格结构、光学性能进行表征及分析，研究了不同衬底对ZnO/多孔硅复合薄膜形貌、结构及光学性能影响。研究结果表明刻蚀时间为20 min的复合薄膜结晶性更好，在可见光波段有很强的光致发光带，呈现白光发射。
Abstract: Using metal auxiliary chemical etching (MACE) of different porous silicon substrate, prepared by the sol-gel method with zinc acetate (Zn(CH3COO)2•2H2O) liquid anhydrous ethanol as precursor preparation of ZnO/porous silicon composite membrane by means of scanning electron microscope (SEM), X-ray diffraction (XRD) to hair spectroscopy (PL), and other means, on the surface morphology of ZnO/porous silicon composite film lattice structure, optical properties were char-acterized and analyzed to study the different substrate of ZnO/porous silicon composite membrane morphology structure and optical properties. The results showed that the composite film with etching time of 20 min had better crystallinity, and had a strong photoluminescence band in the visible band, presenting white light emission.
文章引用：倪惟一, 端木庆铎. ZnO/多孔硅复合薄膜的光学性能[J]. 应用物理, 2020, 10(1): 1-7. https://doi.org/10.12677/APP.2020.101001

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