MEMS行波超声电机模态匹配问题研究
Study on the Mode Matching Issue of MEMS Traveling Wave Ultrasonic Motor
DOI: 10.12677/MET.2020.92010, PDF,  被引量   
作者: 冉龙骐*, 胡 江：麦莫斯成都科技有限公司，四川 成都；周 吴：麦莫斯成都科技有限公司，四川 成都；电子科技大学机械与电气工程学院，四川 成都
关键词: MEMS；微型行波超声电机；谐振；频率匹配；MEMS； Traveling Wave Ultrasonic Motor； Resonance； Frequency Match
摘要: 针对微型行波超声电机行波形成过程中的模态匹配问题，运用理论分析及有限元方法研究了环形定子周边固定支撑梁的刚度及布局对定子正交模态频率及匹配状态的影响规律，结果表明支撑梁刚度越小，正交模态频率匹配越好，但柔软的支撑梁会导致马达承载能力的急速下降，不利于马达转子的驱动。因此本文提出了一种多支撑梁的定子改进结构，在保证电机承载能力的前提下，实现了定子正交模态频率与振型的良好匹配。
Abstract: The theoretical analysis and finite element method were carried out to investigate the influence of stiffness and layout of supporting beams on the frequency and mode match of traveling wave ultrasonic micromotor with ring stators. It was included that the match level increased with the decrease of beam stiffness; a smaller stiffness, however, would reduce the pre-loading capability and be adverse to the drive of rotor. Thus an improved stator structure with multiple supporting beams was proposed in this paper to promote the level of the frequency and mode matching without sacrificing the pre-load capacity of the motor.
文章引用：冉龙骐, 胡江, 周吴. MEMS行波超声电机模态匹配问题研究[J]. 机械工程与技术, 2020, 9(2): 100-107. https://doi.org/10.12677/MET.2020.92010

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