基于6D激光干涉仪的机床误差检测与建模方法

Machine Tool Error Detection and Modeling Method Based on 6D Laser Interferometer

摘要: 为实现数控机床几何误差的快速检测与准确补偿，提出了基于6D激光干涉仪的误差检测与建模方法。基于多体系统理论构建了机床的空间误差模型。基于6D激光干涉仪完成了对机床几何误差的检测，并提出了6D误差与空间误差模型的适配方法。针对误差数据中存在的波浪型误差，提出了基于傅里叶级数的误差建模方法，其相比于多项式在精度上提升了15%。基于i5os系统对圆轨迹进行了误差的补偿实验，补偿后圆度提升了58.79%，对机床精度的提升具有重要意义。

Abstract: In order to realize the rapid detection and accurate compensation of geometric errors of CNC ma-chine tools, an error detection and modeling method based on 6D laser interferometer is proposed. The spatial error model of the machine tool is constructed based on the multi-body system theory. Based on the 6D laser interferometer, the geometric error detection of the machine tool has been completed, and the adaptation method of the 6D error and the spatial error model is proposed. Aiming at the wave-shaped errors in the error data, an error modeling method based on Fourier series is proposed, which improves the accuracy by 15% compared with polynomials. Based on the i5os system, an error compensation experiment was performed on the circular trajectory. After compensation, the roundness increased by 58.79%, which is of great significance to the improvement of machine tool accuracy.