基于数字全息显微的高分辨成像方法的研究

Study on the High-Resolution Imaging Method Based on Digital Holographic Microscopy

摘要: 远场成像分辨率是数字全息显微技术应用于测量微纳米几何量的重要技术参数。高分辨成像对提高全息技术性能具有重要意义。本文分析了小孔结构在提高高频光收集效率、校正像差方面的优势，证明小孔结构具有提高成像分辨率的作用。通过在传统透射式数字全息光路中加入小孔结构，构成高分辨数字全息系统，对标准分辨率板进行实验。实验结果表明，成像弥散斑减小，成像分辨率突破衍射极限，得到提升，为实现数字全息的高分辨测量提供一种技术方法。

Abstract: The resolution of far-field imaging is an important technical parameter of digital holographic microscopy, when it is applied to the measurement of micro-nano geometry. High resolution imaging plays an important role in improving the performance of holographic technology. In this paper, the advantages of the small aperture structure in improving the efficiency of high-frequency light collection and correcting aberration are analyzed, and it is proved that the small aperture structure can improve the imaging resolution. In this paper, a high resolution digital holographic system is constructed by adding small aperture structure into the traditional transmission digital holographic optical path. The experimental results show that the imaging diffusion spot decreases and the imaging resolution breaks through the diffraction limit, which provides a technical method for realizing the high-resolution measurement of digital holography.