飞秒激光等离子体丝金属表面微纳结构制备与调控

Fabrication and Control of Micro-Nano Structure on Metal Surface of Femtosecond Laser Plasma Filament

摘要: 飞秒激光等离子体丝(飞秒光丝)表面处理技术可以实现远程、快速的、任意曲面的功能微纳结构制备，具有重要的应用价值。本文研究了在改变激光入射激光能量、扫描间距、扫描速度等参数的情况下，寻找稳定微纳结构的加工范围(在光丝传输方向上可以实现尺寸稳定的微纳结构制备的传输距离)。实验结果表明，在不同实验条件下，可实现稳定尺寸的微柱结构制备加工范围不同，这与飞秒光丝有效烧蚀金属表面的空间分布随丝传输方向变化有关。

Abstract: Femtosecond laser plasma filament (filament) surface treatment technology can realize remote, fast, and arbitrary curved surface preparation of functional micro-nano structures, which has important application value. This work studied the search for stable micro-nano structure processing range under the condition of changing the laser incident light polarization state, incident laser energy, scanning distance, scanning speed and other parameters (a dimensionally stable micro-nano structure can be realized in the direction of fiber transmission prepared transmission distance). The experimental results show that under different experimental conditions, the preparation and processing ranges of micropillar structures with stable dimensions can be achieved. This is related to the spatial distribution of the femtosecond optical filament effectively ablating the metal surface with the transmission direction of the filament.