1.55 μm波长硅基均匀光栅耦合器的设计与优化

Design and Optimization of Silicon Based Uniform Grating Coupler with 1.55 μm Wavelength

摘要: 为解决光波导器件耦合效率低、难以实现的问题，本文开展了集成光波导耦合技术的研究，设计了一种均匀光栅耦合器，采用时域有限差分法对光栅耦合器进行了仿真和优化。计算结果：光栅耦合器在耦合角度 = 20˚，刻蚀宽度w = 300 nm，刻蚀深度e = 70 nm，周期p = 660 nm时，该种光栅耦合器耦合效率达到57.2%。本文工作可为光栅耦合器的设计提供参考。

Abstract: In order to solve the problem of low coupling efficiency and difficult realization of optical waveguide devices, we carried out the research of integrated optical waveguide coupling technology in this paper, designed a uniform grating coupler, simulated and optimized the grating coupler using finite difference time domain method. Calculation result: when the coupling angle = 20˚, the etching width w = 300 nm, the etching depth e = 70 nm, and the period p = 660 nm, the coupling efficiency of the grating coupler reaches 57.2%. The work of this paper can provide reference for the design of grating coupler.