一种基于磁场模型的阀芯位置检测方法
A Spool Position Detection Method Based on Magnetic Field Model
摘要: 面向集成电路制造领域对输送液体的超洁净要求，超洁净节流阀通过将永磁体嵌入阀芯，实现外部磁场非接触驱动阀芯。为了实现阀芯位移的高精度控制，针对阀芯位置检测的需求，提出了一种非接触式检测方法。结合永磁体几何形状和其激励空间磁场分布，利用优化算法确定分布式多极(DMP)模型中的等效参数，运用DMP模型和等效电流模型描述永磁体的磁场。通过将磁传感器测量值减去外部永磁体产生的磁场得到阀芯产生的磁通密度，基于DMP模型中磁通密度与阀芯位置的映射关系，利用Levenberg-Marquardt算法进行阀芯标记磁源磁逆问题求解，实现阀芯位置检测。使用COMSOL对永磁体建模，通过模型计算所得磁场与COMSOL仿真结果比较，开展模型可行性验证。通过仿真验证所提出的阀芯定位方法的有效性和精度。
Abstract: Facing the ultra-clean requirements for conveying liquids in the field of integrated circuit manu-facturing, the ultra-clean throttle valve can be driven contactlessly by the external magnetic field with embedded permanent magnet (PM) in the valve core. In order to realize the high-precision spool control, a non-contact detection method is proposed to meet the requirements of spool posi-tion detection. Distributed multipole (DMP) model and equivalent current model are used to de-scribe the magnetic field of the PM. Combined with the PM geometry and its excitation spatial mag-netic field distribution, the equivalent parameters of DMP model can be determined by optimiza-tion algorithm. The magnetic flux density generated by the spool was obtained by subtracting the magnetic field generated by the external permanent magnet from the measured value of the mag-netic sensor. Based on the mapping relationship between the magnetic flux density and the spool position of DMP model, and the Levenberg-Marquardt algorithm is used to solve the magnetic in-verse problem of the spool marking magnetic source to realize the spool position detection. The magnetic field calculated by DMP model is compared with the actual PM magnetic flux density dis-tribution, and the feasibility of the DMP model is verified. The effectiveness and accuracy of the proposed spool position detection method are verified by simulation.
文章引用：王龙飞. 一种基于磁场模型的阀芯位置检测方法[J]. 建模与仿真, 2023, 12(1): 169-181. https://doi.org/10.12677/MOS.2023.121017

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