基于金属化处理的FBG温度增敏研究
Temperature Sensitization of FBG Based on Metallization
DOI: 10.12677/JSTA.2023.112017, PDF,   
作者: 翟媛媛：天津工业大学，物理科学与技术学院，天津
关键词: 光纤布拉格光栅；磁控溅射；金属化处理； Fiber Bragg Grating； Magnetron Sputtering； Metallization
摘要: 光纤布拉格光栅(Fiber Bragg Grating, FBG)因其具有小而轻，传感灵敏度高，可复用性强，抗电磁干扰能力强，可实现多点分布式测量等特点，被广泛的应用于航空航天、电力工业、石油化工和地质结构监测等各个领域。由于光纤光栅在应力、温度、浓度、位移、加速度、湿度等传感方向的迅速发展，如何提高传感器的灵敏度一直是一个热点话题。本文通过研究FBG的温度增敏方式，采用磁控溅射的方法对光纤布拉格光栅进行金属化处理，结果表明镍、铜、银涂层材料下的FBG温度传感灵敏度有明显提高、线性度均在0.995以上。通过改变镀膜材料的先后顺序，得到Ni–Ag涂层效果最好，相较于未经处理的FBG，温度灵敏度提升34.7%。
Abstract: Fiber Bragg Grating (FBG) is widely used in various fields, such as aerospace, electric power industry, petrochemical industry and geological structure monitoring, for its characteristics of small and light, high sensing sensitivity, strong reus-ability, strong electromagnetic interference resistance and enabling multi-point distributed meas-urement. Because of the rapid development of fiber Bragg grating in stress, temperature, concen-tration, displacement, acceleration, humidity and other sensing directions, how to improve the sen-sitivity of sensors has been a hot topic. In this paper, the temperature sensitization method of FBG is studied, and the magnetron sputtering method is used to metallify fiber Bragg grating. The results show that the sensitivity of temperature sensing of FBG under Ni, Cu and silver coating materials is significantly improved, and the linearity is above 0.995. By changing the sequence of coating mate-rials, the Ni-Ag coating has the best effect, and the temperature sensitivity is increased by 34.7% compared with the untreated FBG.
文章引用：翟媛媛. 基于金属化处理的FBG温度增敏研究[J]. 传感器技术与应用, 2023, 11(2): 158-165. https://doi.org/10.12677/JSTA.2023.112017

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