氧化物光学薄膜吸收特性的研究进展

Research Progress on Absorption Properties of Oxide Optical Films

摘要: 本文主要对氧化物光学薄膜吸收特性的国内外研究进展进行了综述，并介绍了相关吸收特性测量技术。光学吸收损耗是光学系统中不可忽视的重要一环，它严重影响了光束的传输质量，器件的寿命等，因此低吸收损耗的薄膜在大型光学系统、强激光系统中发挥着很重要的作用。氧化物薄膜具有带隙宽、硬度高、性能稳定、耐腐蚀等优点，大多数光学系统都采用氧化物材料制备薄膜以提高其光学功能。光学薄膜的吸收是光与薄膜中的电子、激子、晶格振动、杂质缺陷等相互作用的过程，目前光学薄膜的沉积工艺包括电子束沉积技术、离子束溅射技术和溶胶–凝胶技术等，其工艺参数的选择是影响光学薄膜吸收的重要因素，其他因素还包括温度、热处理等后处理技术。此外，测量吸收系数的方法也越来越精进，对于吸收损耗的控制也起了关键的作用。随着越来越多薄膜材料的出现，选择合适的薄膜材料及研究其结构、光学性能等是控制吸收损耗的重要一环。

Abstract: In this paper, the research progress of absorption properties of oxide optical films at home and abroad is reviewed, and the relevant absorption measurement techniques are introduced. Optical absorption loss is an important part of optical system, which can not be ignored. It seriously affects the transmission quality of the beam, the life of the device, etc. Therefore, the thin film with low ab-sorption loss plays a very important role in large optical system and strong laser system. Oxide films have the advantages of wide band gap, high hardness, stable performance and corrosion re-sistance. Most optical systems use oxide materials to prepare films to improve their optical func-tions. The absorption of optical film is a process of interaction between light and electrons, excitons, vibration and impurity defects in the film. At present, the deposition process of optical film includes electron beam deposition technology, ion beam sputtering technology and sol-gel technology. The selection of process parameters is an important factor affecting the absorption of optical film, and other factors include temperature, heat treatment and other post-treatment technology. In addition, the measurement method of absorption coefficient is becoming more and more advanced, which also plays a key role in the control of absorption loss. With the appearance of more and more thin film materials, selecting suitable thin film materials and studying their structure and optical prop-erties is an important link to control absorption loss.