薄长片压电振子的强场机械品质因数表征研究
Research on Characterization of High-Field Mechanical Quality Factor of Thin Rectangular Plate Piezoelectric Resonators
摘要: 为探究利用温升和振动测量表征强电场下薄长片压电振子的机械品质因数Qm的可行性，首先对工作在横向长度伸缩振动模式的薄长片压电振子的热传导方程进行建模和有限差分求解分析，推导了压电振子自发热参数hg、边界振动速度幅值Vmax与Qm之间的关系；其次利用有限元仿真和数值求解方法，研究了不同材料参数下薄长片压电振子的振动温升分布的特性，验证了利用温升和振动测量方法表征薄长片压电振子Qm值的准确性；最后搭建了实验装置表征了PZT-4和PZT-8两种压电薄长片压电振子在不同电场下的Qm值，结果表明：不同电场强度下PZT-8压电振子的Qm值均高于PZT-4压电振子，且随着电场强度增大两种压电振子的Qm值均减小，该方法和实验结果可为大功率压电器件的设计和性能表征提供参考。
Abstract: In order to investigate the feasibility of using temperature rise and vibration measurements to characterize the high-field mechanical quality factor Qm of a thin rectangular piezoelectric resonators, a finite difference solution method of the heat conduction equation of a thin rectangular piezoelectric resonators operating in the transverse length extensional vibration mode is firstly presented, and the relationship between the self-heating parameter hg, the edge vibration velocity amplitude Vmax and the mechanical quality factor Qm of the piezoelectric oscillator is derived. Secondly, the vibration and the temperature-rise distribution of the thin rectangular plate piezoelectric oscillator under different material parameters are studied by using finite element simulation and numerical solution, and the accuracy of using temperature rise and vibration measurement methods to characterize the Qm value of the piezoelectric resonators is verified. Finally, an experimental test system is built to characterize the Qm value of PZT-4 and PZT-8 piezoelectric materials under different electric fields. The results show that the Qm values of the PZT-8 piezoelectric resonator are higher than those of the PZT-4 piezoelectric resonator under different electric fields, and the Qm values of both piezoelectric resonators decrease sharply with the increase of electric field amplitude, which can provide a reference for the design and performance characterization of high-power piezoelectric devices.
文章引用：赵恒莉, 郑广斌, 宋李江, 陈赵江. 薄长片压电振子的强场机械品质因数表征研究[J]. 应用物理, 2023, 13(9): 368-379. https://doi.org/10.12677/APP.2023.139041

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